Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142-pxnano2: Revision history

28 June 2023

• curprev 11:3611:36, 28 June 2023‎ Jmli talk contribs‎ 4,255 bytes +73‎ No edit summary

5 October 2020

• curprev 08:0208:02, 5 October 2020‎ Jmli talk contribs‎ 4,182 bytes +51‎ No edit summary

30 July 2018

• curprev 12:4312:43, 30 July 2018‎ Jmli talk contribs‎ 4,131 bytes 0‎ No edit summary

3 February 2016

• curprev 15:2715:27, 3 February 2016‎ Jmli talk contribs‎ 4,131 bytes +50‎ No edit summary

22 October 2013

• curprev 11:4211:42, 22 October 2013‎ Jmli talk contribs‎ 4,081 bytes +232‎ No edit summary

25 May 2011

• curprev 10:5010:50, 25 May 2011‎ Jml talk contribs‎ 3,849 bytes +49‎ →‎nano1.42 versus pxnano2
• curprev 10:4810:48, 25 May 2011‎ Jml talk contribs‎ 3,800 bytes −8‎ →‎nano1.42 versus pxnano2
• curprev 10:4610:46, 25 May 2011‎ Jml talk contribs‎ 3,808 bytes −1,800‎ →‎nano1.42 versus pxnano2
• curprev 10:4610:46, 25 May 2011‎ Jml talk contribs‎ 5,608 bytes +1,802‎ →‎nano1.42 versus pxnano2
• curprev 10:4310:43, 25 May 2011‎ Jml talk contribs‎ 3,806 bytes +166‎ →‎nano1.42 versus pxnano2
• curprev 10:3610:36, 25 May 2011‎ Jml talk contribs‎ 3,640 bytes +448‎ →‎nano1.42 versus pxnano2
• curprev 10:3410:34, 25 May 2011‎ Jml talk contribs‎ 3,192 bytes +1,327‎ →‎nano1.42 versus pxnano2
• curprev 10:3010:30, 25 May 2011‎ Jml talk contribs‎ 1,865 bytes −30‎ →‎nano1.42 versus pxnano2
• curprev 10:2910:29, 25 May 2011‎ Jml talk contribs‎ 1,895 bytes +15‎ →‎nano1.42 versus pxnano2

23 May 2011

• curprev 11:0511:05, 23 May 2011‎ Jml talk contribs‎ 1,880 bytes +2‎ →‎nano1.42 versus pxnano2
• curprev 11:0411:04, 23 May 2011‎ Jml talk contribs‎ 1,878 bytes +12‎ →‎nano1.42 versus pxnano2
• curprev 10:4210:42, 23 May 2011‎ Jml talk contribs‎ 1,866 bytes +84‎ →‎nano1.42 versus pxnano2
• curprev 10:4110:41, 23 May 2011‎ Jml talk contribs‎ 1,782 bytes +321‎ →‎nano1.42 versus pxnano2
• curprev 10:3310:33, 23 May 2011‎ Jml talk contribs‎ 1,461 bytes +11‎ →‎nano1.42 versus pxnano2
• curprev 10:3210:32, 23 May 2011‎ Jml talk contribs‎ 1,450 bytes +10‎ →‎nano1.42 versus pxnano2
• curprev 10:3210:32, 23 May 2011‎ Jml talk contribs‎ 1,440 bytes −1‎ →‎nano1.42 versus pxnano2
• curprev 10:3210:32, 23 May 2011‎ Jml talk contribs‎ 1,441 bytes +2‎ →‎nano1.42 versus pxnano2
• curprev 10:3110:31, 23 May 2011‎ Jml talk contribs‎ 1,439 bytes +11‎ →‎nano1.42 versus pxnano2
• curprev 10:3010:30, 23 May 2011‎ Jml talk contribs‎ 1,428 bytes +3‎ →‎nano1.42 versus pxnano2
• curprev 10:2910:29, 23 May 2011‎ Jml talk contribs‎ 1,425 bytes +29‎ →‎nano1.42 versus pxnano2
• curprev 10:2310:23, 23 May 2011‎ Jml talk contribs‎ 1,396 bytes 0‎ No edit summary
• curprev 10:2310:23, 23 May 2011‎ Jml talk contribs‎ 1,396 bytes 0‎ →‎nano1.42 versus pxnano2
• curprev 09:0909:09, 23 May 2011‎ Jml talk contribs‎ 1,396 bytes +37‎ →‎nano1.42 versus pxnano2

19 May 2011

• curprev 14:3214:32, 19 May 2011‎ Jml talk contribs‎ 1,359 bytes 0‎ →‎nano1.42 versus pxnano2
• curprev 11:3611:36, 19 May 2011‎ Jml talk contribs‎ 1,359 bytes +14‎ →‎nano1.42 versus pxnano2
• curprev 11:3511:35, 19 May 2011‎ Jml talk contribs‎ 1,345 bytes +8‎ →‎nano1.42 versus pxnano2
• curprev 11:3311:33, 19 May 2011‎ Jml talk contribs‎ 1,337 bytes −16‎ →‎nano1.42 versus pxnano2
• curprev 11:3211:32, 19 May 2011‎ Jml talk contribs‎ 1,353 bytes +1,353‎ New page: == nano1.42 versus pxnano2 == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.31''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, HBR 15 sccm...