Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142: Revision history

28 July 2023

• curprev 10:2210:22, 28 July 2023‎ Bghe talk contribs‎ 2,801 bytes +5‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 10:2110:21, 28 July 2023‎ Bghe talk contribs‎ 2,796 bytes 0‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 10:1810:18, 28 July 2023‎ Bghe talk contribs‎ 2,796 bytes +15‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 10:1710:17, 28 July 2023‎ Bghe talk contribs‎ 2,781 bytes +13‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 10:1610:16, 28 July 2023‎ Bghe talk contribs‎ 2,768 bytes +28‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 07:5807:58, 28 July 2023‎ Bghe talk contribs‎ 2,740 bytes +29‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 07:5307:53, 28 July 2023‎ Bghe talk contribs‎ 2,711 bytes −2‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 07:5207:52, 28 July 2023‎ Bghe talk contribs‎ 2,713 bytes +329‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 07:4607:46, 28 July 2023‎ Bghe talk contribs‎ 2,384 bytes +56‎ No edit summary

2 February 2023

• curprev 15:1615:16, 2 February 2023‎ Jmli talk contribs‎ 2,328 bytes +77‎ No edit summary

5 October 2020

• curprev 08:2608:26, 5 October 2020‎ Jmli talk contribs‎ 2,251 bytes +52‎ No edit summary

30 July 2018

• curprev 12:4212:42, 30 July 2018‎ Jmli talk contribs‎ 2,199 bytes 0‎ No edit summary

3 February 2016

• curprev 15:2715:27, 3 February 2016‎ Jmli talk contribs‎ 2,199 bytes +50‎ No edit summary

22 October 2013

• curprev 11:3511:35, 22 October 2013‎ Jmli talk contribs‎ 2,149 bytes +224‎ No edit summary

10 May 2011

• curprev 13:4913:49, 10 May 2011‎ Jml talk contribs‎ 1,925 bytes +891‎ →‎The nano1.42 recipe

9 May 2011

• curprev 08:3308:33, 9 May 2011‎ Jml talk contribs‎ 1,034 bytes 0‎ →‎The nano1.42 recipe
• curprev 08:3308:33, 9 May 2011‎ Jml talk contribs‎ 1,034 bytes +1,034‎ New page: == The nano1.42 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.42''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 75 sccm, SF<su...