Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142: Revision history

28 July 2023

• curprev 11:2211:22, 28 July 2023‎ Bghe talk contribs‎ 2,801 bytes +5‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 11:2111:21, 28 July 2023‎ Bghe talk contribs‎ 2,796 bytes 0‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 11:1811:18, 28 July 2023‎ Bghe talk contribs‎ 2,796 bytes +15‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 11:1711:17, 28 July 2023‎ Bghe talk contribs‎ 2,781 bytes +13‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 11:1611:16, 28 July 2023‎ Bghe talk contribs‎ 2,768 bytes +28‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 08:5808:58, 28 July 2023‎ Bghe talk contribs‎ 2,740 bytes +29‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 08:5308:53, 28 July 2023‎ Bghe talk contribs‎ 2,711 bytes −2‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 08:5208:52, 28 July 2023‎ Bghe talk contribs‎ 2,713 bytes +329‎ →‎Etching SRN (Silicon Rich Nitride) with nano1.42
• curprev 08:4608:46, 28 July 2023‎ Bghe talk contribs‎ 2,384 bytes +56‎ No edit summary

2 February 2023

• curprev 16:1616:16, 2 February 2023‎ Jmli talk contribs‎ 2,328 bytes +77‎ No edit summary

5 October 2020

• curprev 09:2609:26, 5 October 2020‎ Jmli talk contribs‎ 2,251 bytes +52‎ No edit summary

30 July 2018

• curprev 13:4213:42, 30 July 2018‎ Jmli talk contribs‎ 2,199 bytes 0‎ No edit summary

3 February 2016

• curprev 16:2716:27, 3 February 2016‎ Jmli talk contribs‎ 2,199 bytes +50‎ No edit summary

22 October 2013

• curprev 12:3512:35, 22 October 2013‎ Jmli talk contribs‎ 2,149 bytes +224‎ No edit summary

10 May 2011

• curprev 14:4914:49, 10 May 2011‎ Jml talk contribs‎ 1,925 bytes +891‎ →‎The nano1.42 recipe

9 May 2011

• curprev 09:3309:33, 9 May 2011‎ Jml talk contribs‎ 1,034 bytes 0‎ →‎The nano1.42 recipe

• curprev 09:3309:33, 9 May 2011‎ Jml talk contribs‎ 1,034 bytes +1,034‎ New page: == The nano1.42 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.42''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 75 sccm, SF<su...