Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano141: Revision history

2 February 2023

• curprev 16:1616:16, 2 February 2023‎ Jmli talk contribs‎ 2,333 bytes +77‎ →‎The nano1.41 recipe

5 October 2020

• curprev 09:2609:26, 5 October 2020‎ Jmli talk contribs‎ 2,256 bytes +52‎ No edit summary

30 July 2018

• curprev 13:4213:42, 30 July 2018‎ Jmli talk contribs‎ 2,204 bytes 0‎ No edit summary

3 February 2016

• curprev 16:2616:26, 3 February 2016‎ Jmli talk contribs‎ 2,204 bytes +50‎ No edit summary

22 October 2013

• curprev 12:3512:35, 22 October 2013‎ Jmli talk contribs‎ 2,154 bytes +224‎ No edit summary

10 May 2011

• curprev 14:4814:48, 10 May 2011‎ Jml talk contribs‎ 1,930 bytes +891‎ →‎The nano1.41 recipe

9 May 2011

• curprev 09:3609:36, 9 May 2011‎ Jml talk contribs‎ 1,039 bytes 0‎ →‎The nano1.41 recipe

2 May 2011

• curprev 10:0710:07, 2 May 2011‎ Jml talk contribs‎ 1,039 bytes +1‎ →‎The nano1.41 recipe
• curprev 10:0710:07, 2 May 2011‎ Jml talk contribs‎ 1,038 bytes +1,038‎ New page: == The nano1.41 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.41''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 75 sccm, SF<su...