Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13: Revision history

2 February 2023

• curprev 15:1715:17, 2 February 2023‎ Jmli talk contribs‎ 3,527 bytes +77‎ →‎The nano1.3 recipe

5 October 2020

• curprev 07:2907:29, 5 October 2020‎ Jmli talk contribs‎ 3,450 bytes +51‎ No edit summary

30 July 2018

• curprev 12:4212:42, 30 July 2018‎ Jmli talk contribs‎ 3,399 bytes 0‎ No edit summary

3 February 2016

• curprev 15:2515:25, 3 February 2016‎ Jmli talk contribs‎ 3,399 bytes +50‎ No edit summary

22 October 2013

• curprev 11:3411:34, 22 October 2013‎ Jmli talk contribs‎ 3,349 bytes +223‎ No edit summary

10 May 2011

• curprev 13:3013:30, 10 May 2011‎ Jml talk contribs‎ 3,126 bytes +1,735‎ →‎The nano1.3 recipe

4 May 2011

• curprev 14:2414:24, 4 May 2011‎ Jml talk contribs‎ 1,391 bytes +19‎ →‎The nano1.3 recipe

11 April 2011

• curprev 14:0914:09, 11 April 2011‎ Jml talk contribs‎ 1,372 bytes 0‎ →‎The nano1.3 recipe

30 March 2011

• curprev 14:0714:07, 30 March 2011‎ Jml talk contribs‎ 1,372 bytes +1,372‎ New page: == The nano1.3 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.3''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 38 sccm, SF<sub>...