Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano121: Revision history

9 August 2022

• curprev 10:2310:23, 9 August 2022‎ Jmli talk contribs‎ 2,011 bytes +40‎ No edit summary

20 January 2020

• curprev 14:0114:01, 20 January 2020‎ Jmli talk contribs‎ 1,971 bytes +1‎ No edit summary

27 June 2017

• curprev 10:3910:39, 27 June 2017‎ Jmli talk contribs‎ 1,970 bytes +28‎ No edit summary

1 June 2015

• curprev 13:0913:09, 1 June 2015‎ Jmli talk contribs‎ 1,942 bytes +34‎ →‎The nano1.21 recipe
• curprev 13:0713:07, 1 June 2015‎ Jmli talk contribs‎ 1,908 bytes +1‎ →‎The nano1.21 recipe
• curprev 13:0713:07, 1 June 2015‎ Jmli talk contribs‎ 1,907 bytes +18‎ →‎The nano1.21 recipe

10 May 2011

• curprev 13:4513:45, 10 May 2011‎ Jml talk contribs‎ 1,889 bytes +875‎ →‎The nano1.21 recipe

9 May 2011

• curprev 08:3708:37, 9 May 2011‎ Jml talk contribs‎ 1,014 bytes 0‎ →‎The nano1.21 recipe

13 April 2011

• curprev 10:4610:46, 13 April 2011‎ Jml talk contribs‎ 1,014 bytes +1‎ →‎The nano1.21 recipe
• curprev 10:3210:32, 13 April 2011‎ Jml talk contribs‎ 1,013 bytes 0‎ →‎The nano1.21 recipe
• curprev 10:3010:30, 13 April 2011‎ Jml talk contribs‎ 1,013 bytes +1,013‎ New page: == The nano1.21 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.21''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 75 sccm, SF<su...