Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano12: Revision history

2 February 2023

• curprev 15:1715:17, 2 February 2023‎ Jmli talk contribs‎ 2,487 bytes +77‎ →‎The nano1.2 recipe

5 October 2020

• curprev 07:2907:29, 5 October 2020‎ Jmli talk contribs‎ 2,410 bytes +51‎ No edit summary

30 July 2018

• curprev 12:4212:42, 30 July 2018‎ Jmli talk contribs‎ 2,359 bytes 0‎ No edit summary

3 February 2016

• curprev 15:2515:25, 3 February 2016‎ Jmli talk contribs‎ 2,359 bytes +50‎ No edit summary

22 October 2013

• curprev 11:3411:34, 22 October 2013‎ Jmli talk contribs‎ 2,309 bytes +223‎ No edit summary

10 May 2011

• curprev 13:3513:35, 10 May 2011‎ Jml talk contribs‎ 2,086 bytes +48‎ →‎The nano1.2 recipe
• curprev 12:5112:51, 10 May 2011‎ Jml talk contribs‎ 2,038 bytes +846‎ →‎The nano1.2 recipe

4 May 2011

• curprev 14:2314:23, 4 May 2011‎ Jml talk contribs‎ 1,192 bytes −7‎ →‎The nano1.2 recipe

31 March 2011

• curprev 08:4408:44, 31 March 2011‎ Jml talk contribs‎ 1,199 bytes +181‎ →‎The nano1.2 recipe

28 March 2011

• curprev 10:3510:35, 28 March 2011‎ Jml talk contribs‎ 1,018 bytes +1,018‎ New page: == The nano1.2 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.2''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 38 sccm, SF<sub>...