Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano10: Revision history

2 February 2023

• curprev 16:1716:17, 2 February 2023‎ Jmli talk contribs‎ 3,748 bytes +67‎ →‎The nano1.0 recipe

5 October 2020

• curprev 08:3008:30, 5 October 2020‎ Jmli talk contribs‎ 3,681 bytes +51‎ No edit summary

30 July 2018

• curprev 13:4113:41, 30 July 2018‎ Jmli talk contribs‎ 3,630 bytes +1‎ No edit summary

3 February 2016

• curprev 16:2516:25, 3 February 2016‎ Jmli talk contribs‎ 3,629 bytes +50‎ No edit summary

22 October 2013

• curprev 12:3312:33, 22 October 2013‎ Jmli talk contribs‎ 3,579 bytes +222‎ No edit summary

10 May 2011

• curprev 14:3314:33, 10 May 2011‎ Jml talk contribs‎ 3,357 bytes +35‎ →‎The nano1.0 recipe
• curprev 13:5013:50, 10 May 2011‎ Jml talk contribs‎ 3,322 bytes +843‎ →‎The nano1.0 recipe

28 April 2011

• curprev 11:5211:52, 28 April 2011‎ Jml talk contribs‎ 2,479 bytes +9‎ →‎The nano1.0 recipe

31 March 2011

• curprev 09:4309:43, 31 March 2011‎ Jml talk contribs‎ 2,470 bytes +335‎ →‎Comments
• curprev 09:4009:40, 31 March 2011‎ Jml talk contribs‎ 2,135 bytes +139‎ →‎Comments
• curprev 09:3909:39, 31 March 2011‎ Jml talk contribs‎ 1,996 bytes −8‎ →‎Comments
• curprev 09:3809:38, 31 March 2011‎ Jml talk contribs‎ 2,004 bytes +993‎ →‎The nano1.0 recipe

28 March 2011

• curprev 10:3110:31, 28 March 2011‎ Jml talk contribs‎ 1,011 bytes −12‎ →‎The nano1.0 recipe
• curprev 10:3010:30, 28 March 2011‎ Jml talk contribs‎ 1,023 bytes −5‎ →‎The nano1.0 recipe
• curprev 10:2910:29, 28 March 2011‎ Jml talk contribs‎ 1,028 bytes 0‎ →‎The nano1.0 recipe
• curprev 10:2810:28, 28 March 2011‎ Jml talk contribs‎ 1,028 bytes 0‎ →‎The nano1.0 recipe
• curprev 10:2810:28, 28 March 2011‎ Jml talk contribs‎ 1,028 bytes +4‎ No edit summary
• curprev 10:2410:24, 28 March 2011‎ Jml talk contribs‎ 1,024 bytes +1,024‎ New page: == The nano1.0 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.0''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 38 sccm, HBr 15 ...