Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nanobosch6: Revision history

24 August 2021

• curprev 15:1815:18, 24 August 2021‎ Jmli talk contribs‎ 1,543 bytes +51‎ No edit summary

10 July 2019

• curprev 09:4909:49, 10 July 2019‎ Jmli talk contribs‎ 1,492 bytes +51‎ No edit summary

27 June 2017

• curprev 10:4210:42, 27 June 2017‎ Jmli talk contribs‎ 1,441 bytes +27‎ →‎Test run using AZ resist 24/9-2012
• curprev 10:4010:40, 27 June 2017‎ Jmli talk contribs‎ 1,414 bytes +27‎ →‎Test run using AZ resist 24/9-2012

1 June 2015

• curprev 13:1113:11, 1 June 2015‎ Jmli talk contribs‎ 1,387 bytes +31‎ →‎Test run using AZ resist 24/9-2012

29 November 2012

• curprev 13:5913:59, 29 November 2012‎ Jml talk contribs‎ 1,356 bytes +1,356‎ Created page with "== Test run using AZ resist 24/9-2012 == {| border="2" cellpadding="2" cellspacing="1" |+ '''Process conditions''' |- ! rowspan="4" align="center"| Substrate information ! W..."