Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Revision history

1 July 2024

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28 June 2024

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16 March 2023

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8 March 2023

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• curprev 10:0410:04, 8 March 2023‎ Bghe talk contribs‎ 2,395 bytes +6‎ →‎Etch Profile SEM images
• curprev 10:0310:03, 8 March 2023‎ Bghe talk contribs‎ 2,389 bytes +66‎ →‎Etch Profile SEM images
• curprev 10:0210:02, 8 March 2023‎ Bghe talk contribs‎ 2,323 bytes +15‎ →‎Etch Profile SEM images
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• curprev 10:0110:01, 8 March 2023‎ Bghe talk contribs‎ 2,309 bytes +251‎ No edit summary

31 January 2023

• curprev 16:1816:18, 31 January 2023‎ Bghe talk contribs‎ 2,058 bytes 0‎ →‎The slow etch
• curprev 16:1716:17, 31 January 2023‎ Bghe talk contribs‎ 2,058 bytes +6‎ →‎The slow etch

27 January 2023

• curprev 13:2013:20, 27 January 2023‎ Bghe talk contribs‎ 2,052 bytes −1‎ →‎The slow etch
• curprev 13:1913:19, 27 January 2023‎ Bghe talk contribs‎ 2,053 bytes +84‎ →‎The slow etch
• curprev 12:5612:56, 27 January 2023‎ Bghe talk contribs‎ 1,969 bytes +5‎ →‎The slow etch
• curprev 12:5512:55, 27 January 2023‎ Bghe talk contribs‎ 1,964 bytes +492‎ →‎The slow etch
• curprev 11:5411:54, 27 January 2023‎ Bghe talk contribs‎ 1,472 bytes +109‎ →‎The slow etch
• curprev 11:4711:47, 27 January 2023‎ Bghe talk contribs‎ 1,363 bytes +61‎ →‎The slow etch
• curprev 08:5608:56, 27 January 2023‎ Bghe talk contribs‎ 1,302 bytes +81‎ →‎The slow etch
• curprev 08:5208:52, 27 January 2023‎ Bghe talk contribs‎ 1,221 bytes 0‎ →‎The slow etch
• curprev 08:5208:52, 27 January 2023‎ Bghe talk contribs‎ 1,221 bytes +16‎ No edit summary
• curprev 08:5108:51, 27 January 2023‎ Bghe talk contribs‎ 1,205 bytes +23‎ →‎The slow etch
• curprev 08:5008:50, 27 January 2023‎ Bghe talk contribs‎ 1,182 bytes +67‎ →‎The slow etch

15 December 2022

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• curprev 11:3011:30, 15 December 2022‎ Bghe talk contribs‎ 1,115 bytes +1‎ →‎The slow etch

6 December 2022

• curprev 15:5415:54, 6 December 2022‎ Bghe talk contribs‎ 1,114 bytes 0‎ →‎The slow etch
• curprev 15:5315:53, 6 December 2022‎ Bghe talk contribs‎ 1,114 bytes +161‎ →‎The slow etch
• curprev 15:5015:50, 6 December 2022‎ Bghe talk contribs‎ 953 bytes +132‎ →‎The slow etch
• curprev 15:1115:11, 6 December 2022‎ Bghe talk contribs‎ 821 bytes −3‎ →‎The slow etch
• curprev 15:1015:10, 6 December 2022‎ Bghe talk contribs‎ 824 bytes +88‎ →‎The slow etch
• curprev 15:0115:01, 6 December 2022‎ Bghe talk contribs‎ 736 bytes 0‎ →‎The slow etch
• curprev 14:4914:49, 6 December 2022‎ Bghe talk contribs‎ 736 bytes +564‎ →‎The slow etch
• curprev 14:2814:28, 6 December 2022‎ Bghe talk contribs‎ 172 bytes +172‎ Created page with "=The slow etch= The slow etch is designed to etch slow at low powers to etch thin films and to avoid overheating of samples mounted on a carrier with Capton/polyimide tape"