Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Silicon Nitride Etch: Revision history

28 July 2025

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• curprev 14:0914:09, 28 July 2025 Prakus talk contribs 2,452 bytes −1 →Silicon Nitride Recipe
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• curprev 13:3013:30, 28 July 2025 Prakus talk contribs 2,451 bytes −10 →Etch rate uniformity & etch rate
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• curprev 13:1613:16, 28 July 2025 Prakus talk contribs 1,940 bytes +9 →Etch rate uniformity & etch rate Tag: Visual edit
• curprev 13:1513:15, 28 July 2025 Prakus talk contribs 1,931 bytes +377 No edit summary Tag: Visual edit: Switched
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• curprev 10:4810:48, 28 July 2025 Prakus talk contribs 1,479 bytes +9 →Etch rate uniformity & etch rate
• curprev 10:4810:48, 28 July 2025 Prakus talk contribs 1,470 bytes +1,120 No edit summary Tag: Visual edit: Switched

14 July 2025

• curprev 13:1913:19, 14 July 2025 Bghe talk contribs 350 bytes +20 No edit summary
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