Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Nitride Etch: Revision history

6 September 2023

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4 September 2023

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22 August 2023

• curprev 12:3012:30, 22 August 2023‎ Bghe talk contribs‎ 1,534 bytes +1‎ →‎Etching of silicon rich nitride (SRN) with recipes developed for SiO2 etching
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• curprev 12:0112:01, 22 August 2023‎ Bghe talk contribs‎ 1,817 bytes +30‎ →‎Etch rate uniformity
• curprev 11:5711:57, 22 August 2023‎ Bghe talk contribs‎ 1,787 bytes +82‎ →‎Etch rate uniformity
• curprev 11:4811:48, 22 August 2023‎ Bghe talk contribs‎ 1,705 bytes +135‎ →‎Etching of silicon rich nitride (SRN) with recipes developed for SiO2 etching
• curprev 11:3311:33, 22 August 2023‎ Bghe talk contribs‎ 1,570 bytes +2‎ →‎Etching of silicon rich nitride (SRN) with recipes developed for SiO2 etching
• curprev 11:3011:30, 22 August 2023‎ Bghe talk contribs‎ 1,568 bytes +63‎ →‎Etching of silicon rich nitride (SRN) with recipes developed for SiO2 etching
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• curprev 10:5910:59, 22 August 2023‎ Bghe talk contribs‎ 1,392 bytes +998‎ →‎Etching of silicon rich nitride (SRN) with recipes developed for SiO2 etching
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• curprev 10:5310:53, 22 August 2023‎ Bghe talk contribs‎ 81 bytes +81‎ Created page with "==Etching of silicon rich nitride (SRN) with recipes developed for SiO2 etching=="