Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Barc Etch: Revision history

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3 February 2023

28 April 2021

  • curprev 15:2415:24, 28 April 2021‎ Bghe talk contribs‎ 895 bytes +895‎ Created page with "==Barc etch with O2== ''By bghe@nanolab June 2020'' ===Sample=== *6" Si * 2µm SiO2 from C1 *90nm barc *907 nm UVN 2030-0,5 *Reticle: Pegreticle *Dose: 200 J/m2 ===Pegasus 4 s..."
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