Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Revision history

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curprev 11:2511:25, 3 February 2023‎ Bghe talk contribs‎ 1,495 bytes −37‎ No edit summary
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curprev 14:2514:25, 6 December 2022‎ Bghe talk contribs‎ 1,661 bytes +63‎ →‎Process information

curprev 11:5111:51, 1 August 2022‎ Bghe talk contribs‎ 1,598 bytes +5‎ No edit summary
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curprev 11:2011:20, 1 August 2022‎ Bghe talk contribs‎ 1,728 bytes 0‎ →‎Pegasus 4 - 150mm silicon oxide and silicon nitride etching

curprev 08:1408:14, 19 August 2021‎ Bghe talk contribs‎ 1,728 bytes +37‎ No edit summary

curprev 15:2515:25, 28 April 2021‎ Bghe talk contribs‎ 1,691 bytes −67‎ →‎Process information
curprev 15:2515:25, 28 April 2021‎ Bghe talk contribs‎ 1,758 bytes −73‎ →‎Process information
curprev 15:2315:23, 28 April 2021‎ Bghe talk contribs‎ 1,831 bytes +26‎ →‎Process information

curprev 08:2708:27, 5 February 2021‎ Bghe talk contribs‎ 1,805 bytes +1‎ →‎Process information
curprev 08:2708:27, 5 February 2021‎ Bghe talk contribs‎ 1,804 bytes +25‎ →‎Process information
curprev 08:2708:27, 5 February 2021‎ Bghe talk contribs‎ 1,779 bytes −69‎ →‎Pegasus 4 - 150mm silicon oxide and silicon nitride etching

curprev 16:0616:06, 16 November 2020‎ Jmli talk contribs‎ 1,848 bytes −933‎ →‎Other etch processes
curprev 16:0616:06, 16 November 2020‎ Jmli talk contribs‎ 2,781 bytes −624‎ →‎Acceptance test
curprev 16:0416:04, 16 November 2020‎ Jmli talk contribs‎ 3,405 bytes −649‎ →‎Advanced Processing - Henri Jansen style

curprev 15:2015:20, 25 March 2020‎ Qugig talk contribs‎ 4,054 bytes +7‎ →‎Process information
curprev 15:1815:18, 25 March 2020‎ Qugig talk contribs‎ 4,047 bytes 0‎ →‎Pegasus 4 - 150mm silicon oxide and silicon nitride etching
curprev 15:1715:17, 25 March 2020‎ Qugig talk contribs‎ 4,047 bytes −1,024‎ No edit summary
curprev 14:2314:23, 25 March 2020‎ Qugig talk contribs‎ 5,071 bytes +4,419‎ No edit summary

curprev 07:5307:53, 24 June 2019‎ Bghe talk contribs‎ 652 bytes +85‎ →‎Pegasus 4 - 150mm silicon oxide and silicon nitride etching
curprev 07:5207:52, 24 June 2019‎ Bghe talk contribs‎ 567 bytes 0‎ →‎Pegasus 4 - 150mm Silicon oxide and silicon nitride etching
curprev 07:5207:52, 24 June 2019‎ Bghe talk contribs‎ 567 bytes +73‎ No edit summary

curprev 09:4309:43, 30 July 2018‎ Jmli talk contribs‎ 494 bytes +121‎ No edit summary

curprev 14:2414:24, 3 July 2018‎ Jmli talk contribs‎ 373 bytes +278‎ No edit summary

curprev 09:4909:49, 26 June 2018‎ Jmli talk contribs‎ 95 bytes +7‎ No edit summary
curprev 09:4809:48, 26 June 2018‎ Jmli talk contribs‎ 88 bytes +88‎ Created page with "The tool is currently being installed - we hope that it will be available by early 2019."

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