Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Revision history

1 May 2023

• curprev 08:2308:23, 1 May 2023‎ Mfarin talk contribs‎ 11,803 bytes +213‎ No edit summary

27 April 2023

• curprev 08:3608:36, 27 April 2023‎ Mfarin talk contribs‎ 11,590 bytes +1‎ →‎Al2O3 mask
• curprev 08:3508:35, 27 April 2023‎ Mfarin talk contribs‎ 11,589 bytes +21‎ →‎Al2O3 mask

23 February 2023

• curprev 10:2010:20, 23 February 2023‎ Mfarin talk contribs‎ 11,568 bytes −1,578‎ →‎DREM 0.2kW
• curprev 10:1810:18, 23 February 2023‎ Mfarin talk contribs‎ 13,146 bytes −140‎ →‎ORE process
• curprev 10:1710:17, 23 February 2023‎ Mfarin talk contribs‎ 13,286 bytes +124‎ →‎DREM 0.2kW
• curprev 10:0810:08, 23 February 2023‎ Mfarin talk contribs‎ 13,162 bytes +14‎ →‎ORE process
• curprev 10:0710:07, 23 February 2023‎ Mfarin talk contribs‎ 13,148 bytes +6‎ →‎DREM 0.2kW
• curprev 10:0710:07, 23 February 2023‎ Mfarin talk contribs‎ 13,142 bytes +1,584‎ →‎Isotropic etch

17 February 2023

• curprev 12:5612:56, 17 February 2023‎ Mfarin talk contribs‎ 11,558 bytes +68‎ →‎Nanoholes
• curprev 12:5212:52, 17 February 2023‎ Mfarin talk contribs‎ 11,490 bytes +3‎ →‎Nanoholes
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• curprev 11:1811:18, 17 February 2023‎ Mfarin talk contribs‎ 11,411 bytes +278‎ →‎Isotropic etch
• curprev 11:0311:03, 17 February 2023‎ Mfarin talk contribs‎ 11,133 bytes +26‎ No edit summary
• curprev 11:0211:02, 17 February 2023‎ Mfarin talk contribs‎ 11,107 bytes −112‎ →‎THIS PAGE IS UNDER CONSTRUCTION200px

14 February 2023

• curprev 15:5115:51, 14 February 2023‎ Mfarin talk contribs‎ 11,219 bytes +133‎ →‎Nanoholes
• curprev 15:4615:46, 14 February 2023‎ Mfarin talk contribs‎ 11,086 bytes +38‎ →‎Isotropic etch
• curprev 15:4615:46, 14 February 2023‎ Mfarin talk contribs‎ 11,048 bytes +37‎ →‎Nanoholes
• curprev 15:4515:45, 14 February 2023‎ Mfarin talk contribs‎ 11,011 bytes +38‎ →‎Nanoholes
• curprev 15:4515:45, 14 February 2023‎ Mfarin talk contribs‎ 10,973 bytes +38‎ →‎Holes
• curprev 15:4515:45, 14 February 2023‎ Mfarin talk contribs‎ 10,935 bytes +19‎ →‎Pillars
• curprev 15:4215:42, 14 February 2023‎ Mfarin talk contribs‎ 10,916 bytes +10‎ →‎Al2O3 mask
• curprev 15:4115:41, 14 February 2023‎ Mfarin talk contribs‎ 10,906 bytes +135‎ →‎Al2O3 mask
• curprev 15:3915:39, 14 February 2023‎ Mfarin talk contribs‎ 10,771 bytes +5‎ →‎Al2O3 mask
• curprev 15:3915:39, 14 February 2023‎ Mfarin talk contribs‎ 10,766 bytes +32‎ →‎Al2O3 mask
• curprev 15:3615:36, 14 February 2023‎ Mfarin talk contribs‎ 10,734 bytes +34‎ →‎Al2O3 mask
• curprev 15:3515:35, 14 February 2023‎ Mfarin talk contribs‎ 10,700 bytes +9‎ →‎Al2O3 mask

31 January 2023

• curprev 14:5914:59, 31 January 2023‎ Mfarin talk contribs‎ 10,691 bytes +3‎ →‎Al2O3 mask
• curprev 14:5814:58, 31 January 2023‎ Mfarin talk contribs‎ 10,688 bytes +8‎ →‎Al2O3 mask
• curprev 14:5814:58, 31 January 2023‎ Mfarin talk contribs‎ 10,680 bytes +20‎ →‎Al2O3 mask
• curprev 14:3414:34, 31 January 2023‎ Mfarin talk contribs‎ 10,660 bytes −35‎ →‎Al2O3 mask
• curprev 14:3414:34, 31 January 2023‎ Mfarin talk contribs‎ 10,695 bytes +332‎ →‎Al2O3 mask
• curprev 14:0114:01, 31 January 2023‎ Mfarin talk contribs‎ 10,363 bytes 0‎ →‎Al2O3 mask
• curprev 14:0014:00, 31 January 2023‎ Mfarin talk contribs‎ 10,363 bytes 0‎ →‎Al2O3 mask
• curprev 14:0014:00, 31 January 2023‎ Mfarin talk contribs‎ 10,363 bytes 0‎ →‎Al2O3 mask
• curprev 13:5913:59, 31 January 2023‎ Mfarin talk contribs‎ 10,363 bytes −1‎ →‎Al2O3 mask
• curprev 13:5813:58, 31 January 2023‎ Mfarin talk contribs‎ 10,364 bytes 0‎ →‎Al2O3 mask
• curprev 13:5813:58, 31 January 2023‎ Mfarin talk contribs‎ 10,364 bytes +1‎ →‎Al2O3 mask
• curprev 13:5613:56, 31 January 2023‎ Mfarin talk contribs‎ 10,363 bytes +207‎ →‎Al2O3 mask
• curprev 12:2312:23, 31 January 2023‎ Mfarin talk contribs‎ 10,156 bytes 0‎ →‎Al2O3 mask
• curprev 12:2312:23, 31 January 2023‎ Mfarin talk contribs‎ 10,156 bytes +94‎ →‎Al2O3 mask
• curprev 12:1912:19, 31 January 2023‎ Mfarin talk contribs‎ 10,062 bytes +137‎ →‎Al2O3 mask
• curprev 12:1612:16, 31 January 2023‎ Mfarin talk contribs‎ 9,925 bytes −40‎ →‎Al2O3 mask
• curprev 12:1512:15, 31 January 2023‎ Mfarin talk contribs‎ 9,965 bytes −57‎ →‎Al2O3 mask
• curprev 12:1512:15, 31 January 2023‎ Mfarin talk contribs‎ 10,022 bytes +413‎ →‎Al2O3 mask
• curprev 12:1212:12, 31 January 2023‎ Mfarin talk contribs‎ 9,609 bytes +10‎ →‎Al2O3 mask
• curprev 12:1012:10, 31 January 2023‎ Mfarin talk contribs‎ 9,599 bytes +58‎ →‎Al2O3 mask
• curprev 11:5711:57, 31 January 2023‎ Mfarin talk contribs‎ 9,541 bytes +41‎ →‎Nanoholes
• curprev 11:5611:56, 31 January 2023‎ Mfarin talk contribs‎ 9,500 bytes +12‎ →‎Nanoholes