Specific Process Knowledge/Etch/DRIE-Pegasus/Parameters: Revision history

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11 December 2012

• curprev 15:1515:15, 11 December 2012‎ Jml talk contribs‎ 1,666 bytes +1,666‎ Created page with "Short description of some process parameters on the DRIE-Pegasus ; Hardware : The inside of the process chamber on the Pegasus may be slightly modified. # ''Spacers '': The..."