Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch: Revision history

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• curprev 14:0414:04, 25 February 2011‎ Jml talk contribs‎ 2,159 bytes +2,159‎ New page: ; Question : One of our 'popular' etches on the old ASE, a switched etch of nanostructures , is proving very difficult to transfer to the Pegasus. The structures are typically e-beam defin...