Specific Process Knowledge/Etch/DRIE-Pegasus/Etch high aspect ratio silicon microstructures: Revision history

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9 August 2022

20 January 2020

26 October 2017

  • curprev 13:3413:34, 26 October 2017‎ Bghe talk contribs‎ 2,277 bytes +2,277‎ Created page with "By performing a finely tuned process, which is called '''DREM process''' (Deposit, Removal, Etch Method), an infinite etch selectivity can be achieved with conventional photor..."
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