Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch: Revision history

24 August 2021

• curprev 15:1415:14, 24 August 2021‎ Jmli talk contribs‎ 9,812 bytes +50‎ No edit summary

25 June 2019

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• curprev 14:2014:20, 25 June 2019‎ Jmli talk contribs‎ 9,642 bytes +4‎ →‎dfasdf
• curprev 14:1914:19, 25 June 2019‎ Jmli talk contribs‎ 9,638 bytes +1‎ →‎dfasdf
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• curprev 14:1314:13, 25 June 2019‎ Jmli talk contribs‎ 9,519 bytes +4,494‎ →‎Etch processes designed for stepper resists
• curprev 14:1114:11, 25 June 2019‎ Jmli talk contribs‎ 5,025 bytes −1‎ No edit summary

14 May 2018

• curprev 09:5709:57, 14 May 2018‎ Jmli talk contribs‎ 5,026 bytes +266‎ No edit summary

2 June 2016

• curprev 12:5112:51, 2 June 2016‎ Jmli talk contribs‎ 4,760 bytes +61‎ →‎Etch processes designed for stepper resists
• curprev 12:5012:50, 2 June 2016‎ Jmli talk contribs‎ 4,699 bytes 0‎ →‎Etch processes designed for stepper resists
• curprev 12:5012:50, 2 June 2016‎ Jmli talk contribs‎ 4,699 bytes 0‎ →‎Etch processes designed for stepper resists
• curprev 12:5012:50, 2 June 2016‎ Jmli talk contribs‎ 4,699 bytes +1‎ →‎Etch processes designed for stepper resists
• curprev 12:0312:03, 2 June 2016‎ Jmli talk contribs‎ 4,698 bytes +282‎ No edit summary
• curprev 11:0111:01, 2 June 2016‎ Jmli talk contribs‎ 4,416 bytes +4,416‎ Created page with "{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" |+ '''Process parameters''' |- ! rowspan="3" width="100"| Recipe ! rowspan="3" width="20"| Step ! rows..."