Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal: Revision history

14 May 2024

• curprev 13:4813:48, 14 May 2024‎ Bghe talk contribs‎ 2,586 bytes −14‎ →‎Al2O3 etching with the ICP metal

30 January 2024

• curprev 12:3812:38, 30 January 2024‎ Bghe talk contribs‎ 2,600 bytes +20‎ →‎Al2O3 etching by sanvis@nanolab
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22 November 2023

• curprev 14:4514:45, 22 November 2023‎ Bghe talk contribs‎ 2,610 bytes +50‎ →‎Results

3 February 2023

• curprev 09:3209:32, 3 February 2023‎ Jmli talk contribs‎ 2,560 bytes 0‎ →‎Al2O3 etching by sanvis@nanolab 70px

2 February 2023

• curprev 16:4416:44, 2 February 2023‎ Bghe talk contribs‎ 2,560 bytes +5‎ →‎Al2O3 etching by sanvis@nanolab 70px
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• curprev 16:3816:38, 2 February 2023‎ Bghe talk contribs‎ 2,555 bytes 0‎ →‎Al2O3 etching by sanvis@nanolab 70px
• curprev 16:1616:16, 2 February 2023‎ Bghe talk contribs‎ 2,555 bytes +41‎ →‎Al2O3 etching by sanvis@nanolab 70px
• curprev 16:0616:06, 2 February 2023‎ Bghe talk contribs‎ 2,514 bytes +1‎ No edit summary

11 October 2022

• curprev 11:4411:44, 11 October 2022‎ Sanvis talk contribs‎ 2,513 bytes +39‎ →‎Al2O3 etching by sanvis@nanolab 70px

7 October 2022

• curprev 13:5613:56, 7 October 2022‎ Bghe talk contribs‎ 2,474 bytes −87‎ →‎Results

30 September 2022

• curprev 14:3814:38, 30 September 2022‎ Bghe talk contribs‎ 2,561 bytes +687‎ →‎Al2O3 etching by sanvis@nanolab 70px
• curprev 14:0014:00, 30 September 2022‎ Bghe talk contribs‎ 1,874 bytes +46‎ →‎Al2O3 etching by sanvis@nanolab

4 August 2022

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• curprev 15:0315:03, 4 August 2022‎ Bghe talk contribs‎ 1,828 bytes +15‎ →‎Results
• curprev 15:0215:02, 4 August 2022‎ Bghe talk contribs‎ 1,813 bytes +130‎ →‎Results
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• curprev 15:0015:00, 4 August 2022‎ Bghe talk contribs‎ 1,485 bytes +149‎ →‎Results
• curprev 14:4614:46, 4 August 2022‎ Bghe talk contribs‎ 1,336 bytes +389‎ →‎Al2O3 etching by bghe@nanolab
• curprev 14:4514:45, 4 August 2022‎ Bghe talk contribs‎ 947 bytes +35‎ No edit summary

20 June 2022

• curprev 14:4314:43, 20 June 2022‎ Sanvis talk contribs‎ 912 bytes +2‎ No edit summary
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18 August 2021

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28 January 2019

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20 January 2017

• curprev 15:0815:08, 20 January 2017‎ Bghe talk contribs‎ 837 bytes −114‎ No edit summary
• curprev 15:0815:08, 20 January 2017‎ Bghe talk contribs‎ 951 bytes −99‎ →‎Etch rates in different materials using the standard "Silicon oxide etch with resist mask"
• curprev 15:0815:08, 20 January 2017‎ Bghe talk contribs‎ 1,050 bytes +36‎ →‎Etch rates in different materials using the standard "Silicon oxide etch with resist mask"
• curprev 15:0415:04, 20 January 2017‎ Bghe talk contribs‎ 1,014 bytes −1,012‎ →‎THIS PAGE IS UNDER CONSTRUCTION200px
• curprev 14:5514:55, 20 January 2017‎ Bghe talk contribs‎ 2,026 bytes +1,680‎ No edit summary

• curprev 14:5314:53, 20 January 2017‎ Bghe talk contribs‎ 346 bytes +346‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etc..."