Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE: Revision history

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curprev 17:4617:46, 20 December 2022‎ Bghe talk contribs‎ 4,670 bytes −38‎ →‎Small variation of the Silicon nitride etch of the STS recommended silicon nitride recipe - with Cr mask
curprev 17:4317:43, 20 December 2022‎ Bghe talk contribs‎ 4,708 bytes −23‎ →‎Silicon nitride etch with STS recommended silicon nitride recipe

curprev 15:0615:06, 18 August 2021‎ Bghe talk contribs‎ 3,606 bytes 0‎ No edit summary

curprev 10:5210:52, 28 January 2019‎ Bghe talk contribs‎ 3,606 bytes +2‎ →‎Silicon nitride etch with lower etch rate
curprev 10:5110:51, 28 January 2019‎ Bghe talk contribs‎ 3,604 bytes 0‎ →‎Silicon nitride etch with the standard silicon oxide etch
curprev 10:5110:51, 28 January 2019‎ Bghe talk contribs‎ 3,604 bytes +24‎ →‎Silicon nitride etch with STS recommended silicon nitride recipe

curprev 15:0315:03, 7 June 2016‎ Bghe talk contribs‎ 3,580 bytes 0‎ →‎Silicon nitride etch with lower etch rate

curprev 11:1011:10, 30 May 2016‎ Bghe talk contribs‎ 3,580 bytes −4‎ →‎Silicon nitride etch with STS recommended silicon nitride recipe

curprev 09:5209:52, 11 April 2016‎ Bghe talk contribs‎ 3,584 bytes +70‎ →‎Silicon nitride etch with STS recommended silicon nitride recipe

curprev 10:5410:54, 11 March 2016‎ Bghe talk contribs‎ 2,567 bytes −67‎ →‎Silicon nitride etch with the standard silicon oxide etch

curprev 12:5812:58, 16 October 2015‎ Bghe talk contribs‎ 2,634 bytes +47‎ No edit summary
curprev 12:5612:56, 16 October 2015‎ Bghe talk contribs‎ 2,587 bytes −899‎ →‎Silicon nitride etch with the standard silicon oxide etch
curprev 12:5312:53, 16 October 2015‎ Bghe talk contribs‎ 3,486 bytes +2,173‎ No edit summary

curprev 11:2711:27, 1 September 2014‎ Bghe talk contribs‎ 1,313 bytes +72‎ No edit summary

curprev 10:4110:41, 24 October 2013‎ Bghe talk contribs‎ 1,241 bytes +2‎ No edit summary
curprev 10:3910:39, 24 October 2013‎ Bghe talk contribs‎ 1,239 bytes +52‎ No edit summary
curprev 10:3610:36, 24 October 2013‎ Bghe talk contribs‎ 1,187 bytes +74‎ No edit summary

curprev 10:0710:07, 24 September 2013‎ Bghe talk contribs‎ 1,113 bytes 0‎ No edit summary
curprev 10:0710:07, 24 September 2013‎ Bghe talk contribs‎ 1,113 bytes +252‎ No edit summary

curprev 08:3108:31, 16 May 2013‎ Bghe talk contribs‎ 861 bytes +14‎ No edit summary
curprev 08:3008:30, 16 May 2013‎ Bghe talk contribs‎ 847 bytes +97‎ No edit summary

curprev 12:5912:59, 3 January 2012‎ BGE talk contribs‎ 750 bytes +145‎ No edit summary
curprev 12:5512:55, 3 January 2012‎ BGE talk contribs‎ 605 bytes +605‎ New page: {| border="2" cellspacing="2" cellpadding="3" !Parameter !SiN_etch |- |Coil Power [W] |700 |- |Platen Power [W] |100 |- |Platen temperature [<sup>o</sup>C] |0 |- |C<math>_4</math>F<math>_...

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