Specific Process Knowledge/Characterization/Topographic measurement: Revision history

25 June 2025

• curprev 10:1610:16, 25 June 2025 Reet talk contribs 7,973 bytes −7 →Comparison of Stylus Profilers, Optical Profilers and AFMs at Nanolab
• curprev 10:1310:13, 25 June 2025 Reet talk contribs 7,980 bytes −165 →Comparison of Stylus Profilers, Optical Profilers and AFMs at Nanolab
• curprev 10:0910:09, 25 June 2025 Reet talk contribs 8,145 bytes +71 →Comparison of Stylus Profilers, Optical Profilers and AFMs at Nanolab

27 May 2025

• curprev 21:0521:05, 27 May 2025 Mmat talk contribs m 8,074 bytes 0 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 21:0121:01, 27 May 2025 Mmat talk contribs m 8,074 bytes +25 No edit summary
• curprev 21:0021:00, 27 May 2025 Mmat talk contribs m 8,049 bytes −64 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 20:4620:46, 27 May 2025 Mmat talk contribs m 8,113 bytes 0 →Thin film thickness
• curprev 20:4620:46, 27 May 2025 Mmat talk contribs m 8,113 bytes 0 →High aspect ratio structures
• curprev 20:4620:46, 27 May 2025 Mmat talk contribs m 8,113 bytes +6 →High aspect ratio structures
• curprev 20:4620:46, 27 May 2025 Mmat talk contribs m 8,107 bytes +1 →Thin film thickness
• curprev 20:4620:46, 27 May 2025 Mmat talk contribs m 8,106 bytes +16 No edit summary
• curprev 20:4420:44, 27 May 2025 Mmat talk contribs m 8,090 bytes +35 →Topographic measurements
• curprev 20:4120:41, 27 May 2025 Mmat talk contribs m 8,055 bytes +54 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 20:4020:40, 27 May 2025 Mmat talk contribs m 8,001 bytes +1 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 20:4020:40, 27 May 2025 Mmat talk contribs m 8,000 bytes −2 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 20:3820:38, 27 May 2025 Mmat talk contribs m 8,002 bytes −87 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 19:0519:05, 27 May 2025 Mmat talk contribs m 8,089 bytes −29 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab

22 January 2024

• curprev 12:4012:40, 22 January 2024 Reet talk contribs m 8,118 bytes −1 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 12:3912:39, 22 January 2024 Reet talk contribs 8,119 bytes +6 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab

28 June 2023

• curprev 09:3909:39, 28 June 2023 Reet talk contribs 8,113 bytes +14 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab

20 May 2022

• curprev 09:4409:44, 20 May 2022 Reet talk contribs 8,099 bytes +55 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 09:4109:41, 20 May 2022 Reet talk contribs m 8,044 bytes +22 →Topographic measurements: minor updates

24 November 2021

• curprev 12:0112:01, 24 November 2021 Reet talk contribs m 8,022 bytes −6 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 12:0012:00, 24 November 2021 Reet talk contribs m 8,028 bytes 0 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab: new Dektak position

6 February 2021

• curprev 23:1523:15, 6 February 2021 Reet talk contribs m 8,028 bytes +24 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 23:1223:12, 6 February 2021 Reet talk contribs m 8,004 bytes +61 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 23:1023:10, 6 February 2021 Reet talk contribs m 7,943 bytes +77 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab

5 February 2021

• curprev 16:3116:31, 5 February 2021 Reet talk contribs 7,866 bytes +19 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 16:2016:20, 5 February 2021 Reet talk contribs m 7,847 bytes −17 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab
• curprev 15:1715:17, 5 February 2021 Reet talk contribs 7,864 bytes +71 →Comparison of stylus profilers, optical profilers and AFMs at Nanolab

15 April 2020

• curprev 16:4916:49, 15 April 2020 Reet talk contribs m 7,793 bytes −34 →Topographic measurements: Altered the structure of section titles
• curprev 16:4516:45, 15 April 2020 Reet talk contribs 7,827 bytes +459 added section with link to comparison of all the film thickness measurement techniques
• curprev 15:2515:25, 15 April 2020 Reet talk contribs 7,368 bytes +57 Added newer instruments in top section and adjusted language
• curprev 15:1715:17, 15 April 2020 Reet talk contribs m 7,311 bytes +1 →Comparison of the stylus profilers, the optical profilers and the AFMs: spelling mistake
• curprev 15:1615:16, 15 April 2020 Reet talk contribs m 7,310 bytes −2 →Comparison of the two stylus profilers, the optical profiler and the AFM: plurals in title
• curprev 15:1515:15, 15 April 2020 Reet talk contribs m 7,312 bytes +3 →Comparison of the two stylus profilers, the optical profiler and the AFM: micro correction
• curprev 13:1613:16, 15 April 2020 Reet talk contribs 7,309 bytes +292 →Comparison of the two stylus profilers, the optical profiler and the AFM: Added location
• curprev 13:0213:02, 15 April 2020 Reet talk contribs 7,017 bytes +579 →Comparison of the two stylus profilers, the optical profiler and the AFM: Added in the Dektak150

14 April 2020

• curprev 07:3207:32, 14 April 2020 Bghe talk contribs 6,438 bytes +17 →Comparison of the two stylus profilers, the optical profiler and the AFM
• curprev 07:3207:32, 14 April 2020 Bghe talk contribs 6,421 bytes +28 →Comparison of the two stylus profilers, the optical profiler and the AFM
• curprev 07:3107:31, 14 April 2020 Bghe talk contribs 6,393 bytes +38 →Comparison of the two stylus profilers, the optical profiler and the AFM
• curprev 07:3007:30, 14 April 2020 Bghe talk contribs 6,355 bytes +37 →Comparison of the two stylus profilers, the optical profiler and the AFM
• curprev 07:2607:26, 14 April 2020 Bghe talk contribs 6,318 bytes −5 →Comparison of the two stylus profilers, the optical profiler and the AFM
• curprev 07:1607:16, 14 April 2020 Bghe talk contribs 6,323 bytes +16 →Comparison of the two stylus profilers, the optical profiler and the AFM
• curprev 07:1507:15, 14 April 2020 Bghe talk contribs 6,307 bytes +22 →Comparison of the two stylus profilers, the optical profiler and the AFM
• curprev 07:1407:14, 14 April 2020 Bghe talk contribs 6,285 bytes 0 →Comparison of the two stylus profilers, the optical profiler and the AFM
• curprev 07:1307:13, 14 April 2020 Bghe talk contribs 6,285 bytes +556 →Comparison of the two stylus profilers, the optical profiler and the AFM

25 November 2019

• curprev 14:0014:00, 25 November 2019 Jmli talk contribs 5,729 bytes +4 No edit summary

1 May 2019

• curprev 14:1914:19, 1 May 2019 Paphol talk contribs 5,725 bytes −11 No edit summary
• curprev 14:1814:18, 1 May 2019 Paphol talk contribs 5,736 bytes −11 →Comparison of the two stylus profilers, the optical profiler and the AFM