Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants: Revision history

22 January 2024

• curprev 12:3612:36, 22 January 2024‎ Reet talk contribs‎ 6,669 bytes −4‎ →‎Comparison of the different methods
• curprev 12:3512:35, 22 January 2024‎ Reet talk contribs‎ 6,673 bytes +219‎ →‎Measurement of Film Thickness and Optical Constants

3 February 2023

• curprev 10:0810:08, 3 February 2023‎ Bghe talk contribs‎ 6,454 bytes +4‎ No edit summary
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29 August 2022

• curprev 13:5813:58, 29 August 2022‎ Bghe talk contribs‎ 6,442 bytes +1‎ →‎Comparison of the different methods
• curprev 13:5313:53, 29 August 2022‎ Bghe talk contribs‎ 6,441 bytes +1‎ →‎Measurement of Film Thickness and Optical Constants

17 April 2020

• curprev 12:1012:10, 17 April 2020‎ Reet talk contribs‎ m 6,440 bytes −135‎ →‎Measurement of Film Thickness and Optical Constants: removed dead link

15 April 2020

• curprev 21:3921:39, 15 April 2020‎ Reet talk contribs‎ 6,575 bytes +106‎ →‎Measurement of Film Thickness and Optical Constants
• curprev 21:2921:29, 15 April 2020‎ Reet talk contribs‎ 6,469 bytes +457‎ →‎Measurement of Film Thickness and Optical Constants: Added XRR and physical masking
• curprev 21:1621:16, 15 April 2020‎ Reet talk contribs‎ 6,012 bytes +1,022‎ →‎Comparison of the different metodes: Added XRR

14 April 2020

• curprev 07:4707:47, 14 April 2020‎ Bghe talk contribs‎ 4,990 bytes +57‎ →‎Comparison of the different metodes
• curprev 07:3507:35, 14 April 2020‎ Bghe talk contribs‎ 4,933 bytes −105‎ →‎Comparison of the different metodes

25 November 2019

• curprev 13:2813:28, 25 November 2019‎ Jmli talk contribs‎ 5,038 bytes −11‎ No edit summary

31 October 2018

• curprev 12:5412:54, 31 October 2018‎ Bghe talk contribs‎ 5,049 bytes −791‎ →‎Film thickness measurement of Polysilicon film (non-transparent >~4µm): Etch + profilometry method

21 June 2017

• curprev 12:4412:44, 21 June 2017‎ Bghe talk contribs‎ 5,840 bytes −476‎ →‎Comparison of the different metodes
• curprev 12:4212:42, 21 June 2017‎ Bghe talk contribs‎ 6,316 bytes −79‎ →‎Measurement of Film Thickness and Optical Constants

26 August 2015

• curprev 08:1608:16, 26 August 2015‎ Bghe talk contribs‎ 6,395 bytes +57‎ →‎Comparison of the different metodes
• curprev 08:0708:07, 26 August 2015‎ Bghe talk contribs‎ 6,338 bytes +31‎ →‎Comparison of the different metodes

28 May 2015

• curprev 10:4010:40, 28 May 2015‎ Bghe talk contribs‎ 6,307 bytes −1‎ →‎Film thickness measurement of Polysilicon film (non-transparent >~4µm): Etch + profilometry method

4 June 2013

• curprev 11:4311:43, 4 June 2013‎ Bghe talk contribs‎ 6,308 bytes +8‎ →‎Comparison of the different metodes
• curprev 11:4211:42, 4 June 2013‎ Bghe talk contribs‎ 6,300 bytes −9‎ →‎Comparison of the different metodes
• curprev 11:4111:41, 4 June 2013‎ Bghe talk contribs‎ 6,309 bytes +1‎ →‎Comparison of the different metodes

5 March 2013

• curprev 14:3514:35, 5 March 2013‎ BGE talk contribs‎ 6,308 bytes −1‎ →‎Comparison of the different metodes
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• curprev 12:2012:20, 5 March 2013‎ BGE talk contribs‎ 6,429 bytes −1‎ →‎Measurement of Film Thickness and Optical Constants
• curprev 12:2012:20, 5 March 2013‎ BGE talk contribs‎ 6,430 bytes −3,511‎ No edit summary
• curprev 12:1912:19, 5 March 2013‎ BGE talk contribs‎ 9,941 bytes −793‎ →‎Film thickness measurement of Polysilicon film (non-transparent >~4µm): Etch + profilometry method
• curprev 12:1812:18, 5 March 2013‎ BGE talk contribs‎ 10,734 bytes +790‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 12:1712:17, 5 March 2013‎ BGE talk contribs‎ 9,944 bytes +144‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 12:1012:10, 5 March 2013‎ BGE talk contribs‎ 9,800 bytes +218‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 12:0612:06, 5 March 2013‎ BGE talk contribs‎ 9,582 bytes +126‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 12:0312:03, 5 March 2013‎ BGE talk contribs‎ 9,456 bytes +517‎ →‎Name of process
• curprev 12:0012:00, 5 March 2013‎ BGE talk contribs‎ 8,939 bytes 0‎ No edit summary
• curprev 11:5511:55, 5 March 2013‎ BGE talk contribs‎ 8,939 bytes +388‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:4811:48, 5 March 2013‎ BGE talk contribs‎ 8,551 bytes +979‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:3611:36, 5 March 2013‎ BGE talk contribs‎ 7,572 bytes +121‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:3511:35, 5 March 2013‎ BGE talk contribs‎ 7,451 bytes +104‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:3311:33, 5 March 2013‎ BGE talk contribs‎ 7,347 bytes +116‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:3011:30, 5 March 2013‎ BGE talk contribs‎ 7,231 bytes +311‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:2311:23, 5 March 2013‎ BGE talk contribs‎ 6,920 bytes +172‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:2211:22, 5 March 2013‎ BGE talk contribs‎ 6,748 bytes +33‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:2011:20, 5 March 2013‎ BGE talk contribs‎ 6,715 bytes +467‎ →‎Comparison methode 1 and methode 2 for the process
• curprev 11:1711:17, 5 March 2013‎ BGE talk contribs‎ 6,248 bytes +1,948‎ No edit summary

1 June 2012

• curprev 09:1709:17, 1 June 2012‎ BGE talk contribs‎ 4,300 bytes +87‎ →‎Comparing equipment for measuring: thickness and optical constants of optical transparent films
• curprev 09:1609:16, 1 June 2012‎ BGE talk contribs‎ 4,213 bytes +172‎ →‎Comparing equipment for measuring: thickness and optical constants of optical transparent films
• curprev 09:1509:15, 1 June 2012‎ BGE talk contribs‎ 4,041 bytes +85‎ →‎Comparing equipment for measuring: thickness and optical constants of optical transparent films
• curprev 09:1309:13, 1 June 2012‎ BGE talk contribs‎ 3,956 bytes +70‎ →‎Comparing equipment for measuring: thickness and optical constants of optical transparent films
• curprev 08:0308:03, 1 June 2012‎ BGE talk contribs‎ 3,886 bytes +536‎ →‎Comparing equipment for measuring: thickness and optical constants of optical transparent films
• curprev 07:5307:53, 1 June 2012‎ BGE talk contribs‎ 3,350 bytes +16‎ →‎Measurement for film thickness
• curprev 07:5207:52, 1 June 2012‎ BGE talk contribs‎ 3,334 bytes −19‎ →‎Film thickness measurement of Polysilicon film (non-transparent >~4µm): Etch + profilometry method