File:WF 2E08b 23mar2011-030.jpg: Revision history

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9 May 2011

  • curprev 09:2909:29, 9 May 2011‎ Jml talk contribs‎ 151 bytes +151‎ Etching of nanostructures in Si using DRIE-Pegasus: nano1.43 recipe, Run ID 2018, time 120 secs, SF6 38, C4F8 75, 4mtorr, 800/30 coil/platen, -20 degs.
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