File:WF 2E07b mar23 2011-060.jpg: Revision history

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29 April 2011

  • curprev 12:4312:43, 29 April 2011‎ Jml talk contribs‎ 151 bytes +151‎ Etching of nanostructures in Si using DRIE-Pegasus: nano1.41 recipe, Run ID 2001, time 120 secs, SF6 38, C4F8 75, 4mtorr, 800/75 coil/platen, -20 degs.
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