File:WF 2E07a mar23 2011-150.jpg: Revision history

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29 April 2011

  • curprev 11:4311:43, 29 April 2011‎ Jml talk contribs‎ 150 bytes +150‎ Etching of nanostructures in Si using DRIE-Pegasus: nano1.4 recipe, Run ID 2000, time 120 secs, SF6 38, C4F8 75, 4mtorr, 800/50 coil/platen, -20 degs.
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