File:WF 2E07a mar23 2011-120.jpg: Revision history

Diff selection: Mark the radio buttons of the revisions to compare and hit enter or the button at the bottom.
Legend: (cur) = difference with latest revision, (prev) = difference with preceding revision, m = minor edit.

29 April 2011

  • curprev 11:4311:43, 29 April 2011‎ Jml talk contribs‎ 150 bytes +150‎ Etching of nanostructures in Si using DRIE-Pegasus: nano1.4 recipe, Run ID 2000, time 120 secs, SF6 38, C4F8 75, 4mtorr, 800/50 coil/platen, -20 degs.
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=File:WF_2E07a_mar23_2011-120.jpg"