File:WF 2E01 mar23 2011 120a.jpg: Revision history

Diff selection: Mark the radio buttons of the revisions to compare and hit enter or the button at the bottom.
Legend: (cur) = difference with latest revision, (prev) = difference with preceding revision, m = minor edit.

30 March 2011

  • curprev 14:0114:01, 30 March 2011‎ Jml talk contribs‎ 189 bytes +189‎ Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=File:WF_2E01_mar23_2011_120a.jpg"