File:WF 2C1 feb2011profile 030.jpg: Revision history

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18 March 2011

  • curprev 11:2911:29, 18 March 2011‎ Jml talk contribs‎ 212 bytes +212‎ The profiles of the 340 nm thick zep resist wafers. The wafers have been over-exposed in the E-beam to make sure that all structures are opened - therefore the 30, 60, 90, 120 and 150 nm lines are somewhat wider.
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