File:WF 2B1 feb06 2011-150.jpg: Revision history

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    16 March 2011

    • curprev 09:5309:53, 16 March 2011‎ Jml talk contribs‎ 212 bytes +212‎ The profiles of the 180 nm thick zep resist wafers. The wafers have been over-exposed in the E-beam to make sure that all structures are opened - therefore the 30, 60, 90, 120 and 150 nm lines are somewhat wider.
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