File:Rs on 4in boron doped poly .png: Revision history

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17 February 2015

  • curprev 15:0415:04, 17 February 2015‎ Paphol talk contribs‎ 191 bytes +191‎ Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour. Result from Trine H. Christensen DTU Space
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