File:Rs AmorBor vs PolyBor .png: Revision history

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19 February 2015

  • curprev 09:3009:30, 19 February 2015Paphol talk contribs 307 bytes +307 Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour and Boron doped a-Si using "AMORBOR" recipe, Deposition time : 75 minutes, B2H6 flow at 7sccm, anneal: 9...