File:IBE-Si-ER-contour.jpg: Revision history

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10 December 2012

  • curprev 09:5709:57, 10 December 2012‎ Khr talk contribs‎ 132 bytes +132‎ IBE etch rate only shows a dependency on Beam Current and Beam Voltage. Values found on the plot should always be tested before use.
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