File:IBE-Si-CA-contour.jpg: Revision history

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10 December 2012

  • curprev 08:5908:59, 10 December 2012‎ Khr talk contribs‎ 215 bytes +215‎ The angle in the corner of an etch structure showed a dependency on Beam and Acc. Voltage and Incident angle, with no interactions between any parameters. Values found on the plot should always be tested before use.
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