Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep: Revision history

5 February 2024

• curprev 13:0413:04, 5 February 2024‎ Thope talk contribs‎ 11,442 bytes +7‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:0313:03, 5 February 2024‎ Thope talk contribs‎ 11,435 bytes +1‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:0313:03, 5 February 2024‎ Thope talk contribs‎ 11,434 bytes −52‎ →‎DTU Nanolab supplied EBL resists
• curprev 13:0213:02, 5 February 2024‎ Thope talk contribs‎ 11,486 bytes −2‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:5712:57, 5 February 2024‎ Thope talk contribs‎ 11,488 bytes +4‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:5712:57, 5 February 2024‎ Thope talk contribs‎ 11,484 bytes −1‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:5712:57, 5 February 2024‎ Thope talk contribs‎ 11,485 bytes −37‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:4212:42, 5 February 2024‎ Thope talk contribs‎ 11,522 bytes −1‎ →‎User supplied resists
• curprev 12:4112:41, 5 February 2024‎ Thope talk contribs‎ 11,523 bytes −75‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:4112:41, 5 February 2024‎ Thope talk contribs‎ 11,598 bytes +1‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:4012:40, 5 February 2024‎ Thope talk contribs‎ 11,597 bytes −496‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:4012:40, 5 February 2024‎ Thope talk contribs‎ 12,093 bytes +76‎ →‎User supplied resists
• curprev 12:3912:39, 5 February 2024‎ Thope talk contribs‎ 12,017 bytes +421‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:3412:34, 5 February 2024‎ Thope talk contribs‎ 11,596 bytes +2‎ →‎DTU Nanolab supplied EBL resists
• curprev 12:3312:33, 5 February 2024‎ Thope talk contribs‎ 11,594 bytes −2‎ →‎Discharge layer application
• curprev 12:3312:33, 5 February 2024‎ Thope talk contribs‎ 11,596 bytes −2‎ →‎Discharge layer application
• curprev 12:3312:33, 5 February 2024‎ Thope talk contribs‎ 11,598 bytes −2‎ →‎Current EBL resist stock
• curprev 12:3312:33, 5 February 2024‎ Thope talk contribs‎ 11,600 bytes +63‎ No edit summary

26 September 2023

• curprev 19:0619:06, 26 September 2023‎ Thope talk contribs‎ 11,537 bytes −382‎ →‎Discharge layer application

5 September 2023

• curprev 07:4807:48, 5 September 2023‎ Thope talk contribs‎ 11,919 bytes +79‎ →‎Current EBL resist stock

4 September 2023

• curprev 11:5311:53, 4 September 2023‎ Thope talk contribs‎ 11,840 bytes 0‎ →‎Current EBL resist stock
• curprev 11:5211:52, 4 September 2023‎ Thope talk contribs‎ 11,840 bytes +2‎ →‎Current EBL resist stock
• curprev 11:4011:40, 4 September 2023‎ Thope talk contribs‎ 11,838 bytes +20‎ →‎Current EBL resist stock
• curprev 11:3911:39, 4 September 2023‎ Thope talk contribs‎ 11,818 bytes +106‎ →‎Current EBL resist stock
• curprev 11:3711:37, 4 September 2023‎ Thope talk contribs‎ 11,712 bytes 0‎ →‎Current EBL resist stock
• curprev 11:3711:37, 4 September 2023‎ Thope talk contribs‎ 11,712 bytes +169‎ →‎Current EBL resist stock
• curprev 11:3511:35, 4 September 2023‎ Thope talk contribs‎ 11,543 bytes −85‎ →‎Current EBL resist stock
• curprev 11:3411:34, 4 September 2023‎ Thope talk contribs‎ 11,628 bytes −85‎ →‎Current EBL resist stock
• curprev 11:3411:34, 4 September 2023‎ Thope talk contribs‎ 11,713 bytes +349‎ →‎Current EBL resist stock
• curprev 11:3211:32, 4 September 2023‎ Thope talk contribs‎ 11,364 bytes +84‎ →‎Current EBL resist stock
• curprev 11:2811:28, 4 September 2023‎ Thope talk contribs‎ 11,280 bytes +85‎ →‎Current EBL resist stock
• curprev 11:2711:27, 4 September 2023‎ Thope talk contribs‎ 11,195 bytes +91‎ →‎Current EBL resist stock
• curprev 11:2611:26, 4 September 2023‎ Thope talk contribs‎ 11,104 bytes −1‎ →‎Current EBL resist stock
• curprev 11:2611:26, 4 September 2023‎ Thope talk contribs‎ 11,105 bytes −3‎ →‎Current EBL resist stock
• curprev 11:2511:25, 4 September 2023‎ Thope talk contribs‎ 11,108 bytes +5‎ →‎Current EBL resist stock
• curprev 11:2411:24, 4 September 2023‎ Thope talk contribs‎ 11,103 bytes +1‎ →‎Resist coating
• curprev 11:2311:23, 4 September 2023‎ Thope talk contribs‎ 11,102 bytes −7‎ →‎Current EBL resist stock
• curprev 11:2311:23, 4 September 2023‎ Thope talk contribs‎ 11,109 bytes +45‎ →‎Resist coating
• curprev 11:2211:22, 4 September 2023‎ Thope talk contribs‎ 11,064 bytes +35‎ →‎Current EBL resist stock
• curprev 11:2111:21, 4 September 2023‎ Thope talk contribs‎ 11,029 bytes 0‎ →‎Current EBL resist stock
• curprev 11:2111:21, 4 September 2023‎ Thope talk contribs‎ 11,029 bytes +5‎ →‎Current EBL resist stock
• curprev 11:2011:20, 4 September 2023‎ Thope talk contribs‎ 11,024 bytes −1,652‎ →‎Resist coating
• curprev 11:1711:17, 4 September 2023‎ Thope talk contribs‎ 12,676 bytes +2,128‎ →‎Resist coating

15 August 2023

• curprev 11:4211:42, 15 August 2023‎ Thope talk contribs‎ 10,548 bytes −4‎ No edit summary
• curprev 11:3811:38, 15 August 2023‎ Thope talk contribs‎ 10,552 bytes −174‎ →‎Inspection
• curprev 11:3711:37, 15 August 2023‎ Thope talk contribs‎ 10,726 bytes +317‎ No edit summary

17 April 2023

• curprev 15:2815:28, 17 April 2023‎ Thope talk contribs‎ 10,409 bytes +1‎ →‎Resist coating
• curprev 15:2715:27, 17 April 2023‎ Thope talk contribs‎ 10,408 bytes −239‎ →‎Resist coating
• curprev 15:2715:27, 17 April 2023‎ Thope talk contribs‎ 10,647 bytes +3‎ →‎Resist coating

8 April 2023

• curprev 13:1413:14, 8 April 2023‎ Thope talk contribs‎ 10,644 bytes +10,644‎ Created page with "=== Resist coating === An appropriate EBL resist must naturally be applied to the substrate. DTU Nanolab supplies a number of standard resists, please consult the table below. The default positive EBL resist is AR-P 6200.09 (CSAR). CSAR installed on Spin Coater: Gamma E-beam and UV for spin coating of 2", 4" and 6" substrates. For other substrate sizes (i.e. chips) or other resists Spec..."