Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Revision history

12 February 2023

• curprev 12:1812:18, 12 February 2023‎ Thope talk contribs‎ 18,425 bytes +2,295‎ →‎Resist coating
• curprev 12:0712:07, 12 February 2023‎ Thope talk contribs‎ 16,130 bytes +49‎ →‎General workflow
• curprev 12:0612:06, 12 February 2023‎ Thope talk contribs‎ 16,081 bytes −9‎ →‎My First JEOL 9500 Exposure Guide
• curprev 12:0512:05, 12 February 2023‎ Thope talk contribs‎ 16,090 bytes +73‎ →‎My First JEOL 9500 Exposure Guide

11 February 2023

• curprev 11:3511:35, 11 February 2023‎ Thope talk contribs‎ 16,017 bytes −111‎ No edit summary

5 February 2023

• curprev 10:4210:42, 5 February 2023‎ Thope talk contribs‎ 16,128 bytes −18‎ →‎My First JEOL 9500 Exposure Guide
• curprev 10:4110:41, 5 February 2023‎ Thope talk contribs‎ 16,146 bytes −23‎ No edit summary

5 May 2022

• curprev 10:2310:23, 5 May 2022‎ Thope talk contribs‎ 16,169 bytes +10‎ →‎Resist coating
• curprev 10:2010:20, 5 May 2022‎ Thope talk contribs‎ 16,159 bytes +10‎ →‎Resist coating
• curprev 10:1910:19, 5 May 2022‎ Thope talk contribs‎ 16,149 bytes −1‎ →‎Resist coating
• curprev 10:1810:18, 5 May 2022‎ Thope talk contribs‎ 16,150 bytes +390‎ →‎Resist coating
• curprev 10:1110:11, 5 May 2022‎ Thope talk contribs‎ 15,760 bytes +12‎ →‎Resist coating
• curprev 10:1010:10, 5 May 2022‎ Thope talk contribs‎ 15,748 bytes +28‎ →‎Resist coating
• curprev 10:0110:01, 5 May 2022‎ Thope talk contribs‎ 15,720 bytes +10‎ →‎Resist coating
• curprev 09:4709:47, 5 May 2022‎ Thope talk contribs‎ 15,710 bytes −113‎ →‎Resist coating
• curprev 09:4609:46, 5 May 2022‎ Thope talk contribs‎ 15,823 bytes +2‎ →‎Resist coating
• curprev 09:4509:45, 5 May 2022‎ Thope talk contribs‎ 15,821 bytes +12‎ →‎Resist coating
• curprev 09:4409:44, 5 May 2022‎ Thope talk contribs‎ 15,809 bytes −267‎ →‎Resist coating
• curprev 09:4309:43, 5 May 2022‎ Thope talk contribs‎ 16,076 bytes −38‎ →‎Resist coating
• curprev 09:3509:35, 5 May 2022‎ Thope talk contribs‎ 16,114 bytes −29‎ →‎Resist coating
• curprev 09:3409:34, 5 May 2022‎ Thope talk contribs‎ 16,143 bytes 0‎ →‎General workflow
• curprev 09:3109:31, 5 May 2022‎ Thope talk contribs‎ 16,143 bytes +49‎ →‎General workflow
• curprev 09:2709:27, 5 May 2022‎ Thope talk contribs‎ 16,094 bytes +1‎ →‎Introduction

20 April 2022

• curprev 19:4319:43, 20 April 2022‎ Thope talk contribs‎ 16,093 bytes +4‎ →‎SDF and JDF file preparation
• curprev 19:4219:42, 20 April 2022‎ Thope talk contribs‎ 16,089 bytes +4‎ →‎SDF and JDF file preparation
• curprev 19:4219:42, 20 April 2022‎ Thope talk contribs‎ 16,085 bytes −1‎ →‎SDF and JDF file preparation
• curprev 19:4119:41, 20 April 2022‎ Thope talk contribs‎ 16,086 bytes −2‎ →‎SDF and JDF file preparation
• curprev 19:4119:41, 20 April 2022‎ Thope talk contribs‎ 16,088 bytes +1‎ →‎SDF and JDF file preparation
• curprev 19:4119:41, 20 April 2022‎ Thope talk contribs‎ 16,087 bytes +1‎ →‎SDF and JDF file preparation
• curprev 19:4119:41, 20 April 2022‎ Thope talk contribs‎ 16,086 bytes −2‎ →‎SDF and JDF file preparation
• curprev 19:4119:41, 20 April 2022‎ Thope talk contribs‎ 16,088 bytes −2‎ →‎SDF and JDF file preparation
• curprev 19:4119:41, 20 April 2022‎ Thope talk contribs‎ 16,090 bytes −1‎ →‎SDF and JDF file preparation
• curprev 19:4019:40, 20 April 2022‎ Thope talk contribs‎ 16,091 bytes +2‎ →‎SDF and JDF file preparation
• curprev 19:4019:40, 20 April 2022‎ Thope talk contribs‎ 16,089 bytes −11‎ →‎SDF and JDF file preparation
• curprev 19:4019:40, 20 April 2022‎ Thope talk contribs‎ 16,100 bytes +53‎ →‎SDF and JDF file preparation
• curprev 19:3519:35, 20 April 2022‎ Thope talk contribs‎ 16,047 bytes +6‎ →‎SDF and JDF file preparation
• curprev 19:3219:32, 20 April 2022‎ Thope talk contribs‎ 16,041 bytes +1,024‎ →‎SDF and JDF file preparation
• curprev 19:2319:23, 20 April 2022‎ Thope talk contribs‎ 15,017 bytes +33‎ →‎Resist coating
• curprev 19:2019:20, 20 April 2022‎ Thope talk contribs‎ 14,984 bytes +30‎ →‎Resist coating

18 April 2022

• curprev 17:4217:42, 18 April 2022‎ Thope talk contribs‎ 14,954 bytes +19‎ No edit summary
• curprev 15:5815:58, 18 April 2022‎ Thope talk contribs‎ 14,935 bytes −2‎ →‎Resist coating
• curprev 15:5715:57, 18 April 2022‎ Thope talk contribs‎ 14,937 bytes +111‎ →‎Resist coating
• curprev 15:5515:55, 18 April 2022‎ Thope talk contribs‎ 14,826 bytes +62‎ →‎Resist coating
• curprev 15:5415:54, 18 April 2022‎ Thope talk contribs‎ 14,764 bytes +29‎ →‎General workflow
• curprev 15:1215:12, 18 April 2022‎ Thope talk contribs‎ 14,735 bytes +220‎ →‎Resist coating
• curprev 15:0615:06, 18 April 2022‎ Thope talk contribs‎ 14,515 bytes +19‎ →‎Resist coating
• curprev 15:0315:03, 18 April 2022‎ Thope talk contribs‎ 14,496 bytes 0‎ →‎Resist coating
• curprev 15:0315:03, 18 April 2022‎ Thope talk contribs‎ 14,496 bytes −225‎ →‎Resist coating
• curprev 14:5914:59, 18 April 2022‎ Thope talk contribs‎ 14,721 bytes −24‎ →‎Spin coating of resist
• curprev 14:5514:55, 18 April 2022‎ Thope talk contribs‎ 14,745 bytes +389‎ →‎Introduction