Specific Process Knowledge/Lithography/EBeamLithography: Revision history

6 September 2022

• curprev 16:2116:21, 6 September 2022 Thope talk contribs 20,099 bytes +59 →Development
• curprev 16:2016:20, 6 September 2022 Thope talk contribs 20,040 bytes −1,461 →Development

5 September 2022

• curprev 17:0917:09, 5 September 2022 Thope talk contribs 21,501 bytes +346 →Proximity Error Correction (PEC)
• curprev 16:5816:58, 5 September 2022 Thope talk contribs 21,155 bytes 0 →Proximity Error Correction (PEC) in BEAMER
• curprev 16:5716:57, 5 September 2022 Thope talk contribs 21,155 bytes +3 →Proximity Error Correction (PEC) in BEAMER
• curprev 16:5216:52, 5 September 2022 Thope talk contribs 21,152 bytes −162 →Proximity Error Correction (PEC)
• curprev 16:4516:45, 5 September 2022 Thope talk contribs 21,314 bytes +86 →Proximity Error Correction
• curprev 15:0015:00, 5 September 2022 Thope talk contribs 21,228 bytes −663 →Development
• curprev 14:5314:53, 5 September 2022 Thope talk contribs 21,891 bytes −210 →Development
• curprev 14:5114:51, 5 September 2022 Thope talk contribs 22,101 bytes +201 →E-beam resists and process guidelines
• curprev 14:1314:13, 5 September 2022 Thope talk contribs 21,900 bytes −145 →E-beam resists
• curprev 14:1214:12, 5 September 2022 Thope talk contribs 22,045 bytes +13 →E-beam resists in the cleanroom
• curprev 14:0414:04, 5 September 2022 Thope talk contribs 22,032 bytes +2 →E-beam resists and process guidelines
• curprev 14:0314:03, 5 September 2022 Thope talk contribs 22,030 bytes +5 →E-beam resists and process guidelines
• curprev 13:1413:14, 5 September 2022 Thope talk contribs 22,025 bytes −319 →E-beam resists
• curprev 13:1213:12, 5 September 2022 Thope talk contribs 22,344 bytes −2,496 →E-beam resists
• curprev 13:1013:10, 5 September 2022 Thope talk contribs 24,840 bytes +2,409 →E-beam resists
• curprev 12:4412:44, 5 September 2022 Thope talk contribs 22,431 bytes +239 →Introduction to E-beam lithography at DTU Nanolab
• curprev 12:4012:40, 5 September 2022 Thope talk contribs 22,192 bytes +1 →Introduction to E-beam lithography at DTU Nanolab
• curprev 11:4711:47, 5 September 2022 Thope talk contribs 22,191 bytes +3 →Introduction to E-beam lithography at DTU Nanolab
• curprev 11:4711:47, 5 September 2022 Thope talk contribs 22,188 bytes +1,519 →Comparison of the e-beam writers at DTU Nanolab

1 July 2022

• curprev 13:5513:55, 1 July 2022 Thope talk contribs 20,669 bytes −6 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5808:58, 1 July 2022 Thope talk contribs 20,675 bytes −11 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5708:57, 1 July 2022 Thope talk contribs 20,686 bytes +2 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5708:57, 1 July 2022 Thope talk contribs 20,684 bytes −5 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5608:56, 1 July 2022 Thope talk contribs 20,689 bytes −3 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5608:56, 1 July 2022 Thope talk contribs 20,692 bytes 0 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5308:53, 1 July 2022 Thope talk contribs 20,692 bytes +3 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5208:52, 1 July 2022 Thope talk contribs 20,689 bytes 0 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5208:52, 1 July 2022 Thope talk contribs 20,689 bytes −194 →E-beam resists
• curprev 08:5108:51, 1 July 2022 Thope talk contribs 20,883 bytes −19 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:5008:50, 1 July 2022 Thope talk contribs 20,902 bytes −333 →Comparison of the e-beam writers at DTU Nanolab
• curprev 08:4808:48, 1 July 2022 Thope talk contribs 21,235 bytes −1 →Performance of the e-beam writers at DTU Nanolab
• curprev 08:4708:47, 1 July 2022 Thope talk contribs 21,236 bytes −91 →Performance of the e-beam writers at DTU Nanolab

24 February 2022

• curprev 21:5921:59, 24 February 2022 Thope talk contribs 21,327 bytes +51 →E-beam resists and Process flow
• curprev 09:3009:30, 24 February 2022 Thope talk contribs 21,276 bytes +266 No edit summary

22 December 2020

• curprev 10:2610:26, 22 December 2020 Taran talk contribs 21,010 bytes +82 No edit summary

16 June 2020

• curprev 16:3116:31, 16 June 2020 Lgpe talk contribs 20,928 bytes +17 →Performance of the e-beam writers at DTU Nanolab

26 March 2020

• curprev 11:4611:46, 26 March 2020 Taran talk contribs 20,911 bytes −8 →E-beam resists
• curprev 11:4211:42, 26 March 2020 Taran talk contribs 20,919 bytes −4 →Development
• curprev 11:3811:38, 26 March 2020 Taran talk contribs 20,923 bytes +3 →Cold development

13 March 2020

• curprev 17:5417:54, 13 March 2020 Thope talk contribs 20,920 bytes +412 No edit summary

24 February 2020

• curprev 15:1415:14, 24 February 2020 Lgpe talk contribs 20,508 bytes 0 →E-beam resists in the cleanroom

26 November 2019

• curprev 10:5610:56, 26 November 2019 Taran talk contribs 20,508 bytes 0 →E-beam resists in the cleanroom

25 November 2019

• curprev 20:0720:07, 25 November 2019 Jmli talk contribs 20,508 bytes 0 →Aluminum coating
• curprev 20:0620:06, 25 November 2019 Jmli talk contribs 20,508 bytes 0 →Trilayer resist stack
• curprev 20:0220:02, 25 November 2019 Jmli talk contribs 20,508 bytes −1 →E-beam resists and Process flow
• curprev 20:0020:00, 25 November 2019 Jmli talk contribs 20,509 bytes 0 →Performance of the e-beam writers at DTU Nanolab
• curprev 18:5418:54, 25 November 2019 Jmli talk contribs 20,509 bytes −4 No edit summary

18 May 2018

• curprev 13:2313:23, 18 May 2018 Lgpe talk contribs 20,513 bytes +77 →Development