Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Revision history

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23 April 2021

5 February 2021

  • curprev 09:2909:29, 5 February 2021‎ Bghe talk contribs‎ 796 bytes +796‎ Created page with "<gallery caption="Recipe no. 10: C06445_02 coil_2500W, platen:300W, He/C4F8= 17.5, C4F8/H2=1, Pressure:8.8mTorr, C4F8:25.6sccm, He:448.7sccm, H2:25.6sccm, 3:56 min " perrow="8..."
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