Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Revision history

1 April 2020

• curprev 07:4907:49, 1 April 2020‎ Jmli talk contribs‎ 12,282 bytes −4‎ →‎Description of the Bosch process at the DRIE-Pegasus
• curprev 07:4907:49, 1 April 2020‎ Jmli talk contribs‎ 12,286 bytes +45‎ →‎Processing options on the Pegasus
• curprev 07:4807:48, 1 April 2020‎ Jmli talk contribs‎ 12,241 bytes 0‎ →‎Description of the Bosch process at the DRIE-Pegasus
• curprev 07:4807:48, 1 April 2020‎ Jmli talk contribs‎ 12,241 bytes +131‎ →‎Description of the Bosch process at the DRIE-Pegasus
• curprev 07:3507:35, 1 April 2020‎ Jmli talk contribs‎ 12,110 bytes +43‎ →‎The Picoscope

26 March 2020

• curprev 09:2809:28, 26 March 2020‎ Jmli talk contribs‎ 12,067 bytes +6‎ →‎Modification of the showerhead
• curprev 09:2509:25, 26 March 2020‎ Jmli talk contribs‎ 12,061 bytes +246‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 09:1309:13, 26 March 2020‎ Jmli talk contribs‎ 11,815 bytes +188‎ →‎Processing options on the Pegasus
• curprev 08:5808:58, 26 March 2020‎ Jmli talk contribs‎ 11,627 bytes +205‎ →‎Processing options on the Pegasus
• curprev 08:5208:52, 26 March 2020‎ Jmli talk contribs‎ 11,422 bytes +11‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 08:5108:51, 26 March 2020‎ Jmli talk contribs‎ 11,411 bytes −22‎ →‎A closer look at the Bosch Process
• curprev 08:5008:50, 26 March 2020‎ Jmli talk contribs‎ 11,433 bytes −26‎ →‎Improving the Bosch process by modifying the showerhead

18 March 2020

• curprev 08:1108:11, 18 March 2020‎ Jmli talk contribs‎ 11,459 bytes −18‎ →‎A few words about RF matching in general

27 June 2018

• curprev 10:0210:02, 27 June 2018‎ Jmli talk contribs‎ 11,477 bytes +13‎ →‎Description of the Bosch process at the DRIE-Pegasus

16 May 2018

• curprev 13:4313:43, 16 May 2018‎ Jmli talk contribs‎ 11,464 bytes +110‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 13:4113:41, 16 May 2018‎ Jmli talk contribs‎ 11,354 bytes +66‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 13:3413:34, 16 May 2018‎ Jmli talk contribs‎ 11,288 bytes +113‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 13:1413:14, 16 May 2018‎ Jmli talk contribs‎ 11,175 bytes +6‎ No edit summary
• curprev 13:1313:13, 16 May 2018‎ Jmli talk contribs‎ 11,169 bytes +149‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 13:0113:01, 16 May 2018‎ Jmli talk contribs‎ 11,020 bytes +93‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 13:0013:00, 16 May 2018‎ Jmli talk contribs‎ 10,927 bytes +337‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 12:5512:55, 16 May 2018‎ Jmli talk contribs‎ 10,590 bytes +171‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 09:2109:21, 16 May 2018‎ Jmli talk contribs‎ 10,419 bytes +235‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 09:0709:07, 16 May 2018‎ Jmli talk contribs‎ 10,184 bytes −1‎ →‎A few words about RF matching in general
• curprev 09:0609:06, 16 May 2018‎ Jmli talk contribs‎ 10,185 bytes +360‎ →‎A few words about RF matching in general

15 May 2018

• curprev 14:4214:42, 15 May 2018‎ Jmli talk contribs‎ 9,825 bytes +87‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 14:4014:40, 15 May 2018‎ Jmli talk contribs‎ 9,738 bytes +37‎ →‎Why RF matching is extremely important in the Bosch process
• curprev 14:3914:39, 15 May 2018‎ Jmli talk contribs‎ 9,701 bytes +664‎ →‎A few words about RF matching - why it is important
• curprev 13:5613:56, 15 May 2018‎ Jmli talk contribs‎ 9,037 bytes +453‎ →‎A few words about RF matching - why it is important
• curprev 13:4413:44, 15 May 2018‎ Jmli talk contribs‎ 8,584 bytes +1‎ →‎A few words about RF matching - why it is important
• curprev 13:4313:43, 15 May 2018‎ Jmli talk contribs‎ 8,583 bytes +616‎ →‎A closer look at the Bosch Process
• curprev 13:0013:00, 15 May 2018‎ Jmli talk contribs‎ 7,967 bytes 0‎ →‎A few words about RF matching - why it is important
• curprev 13:0013:00, 15 May 2018‎ Jmli talk contribs‎ 7,967 bytes +1,708‎ →‎A closer look at the Bosch Process
• curprev 12:4912:49, 15 May 2018‎ Jmli talk contribs‎ 6,259 bytes +104‎ →‎Improving the Bosch process by modifying the showerhead
• curprev 12:4012:40, 15 May 2018‎ Jmli talk contribs‎ 6,155 bytes +27‎ →‎Improving the Bosch process
• curprev 12:4012:40, 15 May 2018‎ Jmli talk contribs‎ 6,128 bytes +1‎ →‎Improving the Bosch process
• curprev 12:3912:39, 15 May 2018‎ Jmli talk contribs‎ 6,127 bytes +19‎ →‎Improving the Bosch process
• curprev 12:3812:38, 15 May 2018‎ Jmli talk contribs‎ 6,108 bytes +45‎ →‎Improving the Bosch process
• curprev 12:3712:37, 15 May 2018‎ Jmli talk contribs‎ 6,063 bytes +65‎ No edit summary
• curprev 12:3612:36, 15 May 2018‎ Jmli talk contribs‎ 5,998 bytes −32‎ →‎Description of the Bosch process at the DRIE-Pegasus
• curprev 12:3512:35, 15 May 2018‎ Jmli talk contribs‎ 6,030 bytes +48‎ →‎Description of the Bosch process at the DRIE-Pegasus
• curprev 12:3412:34, 15 May 2018‎ Jmli talk contribs‎ 5,982 bytes +37‎ →‎Description of the Bosch process at the DRIE-Pegasus (from 2012)
• curprev 12:3212:32, 15 May 2018‎ Jmli talk contribs‎ 5,945 bytes +28‎ →‎The Bosch process at the DRIE-Pegasus

14 May 2018

• curprev 10:4310:43, 14 May 2018‎ Jmli talk contribs‎ 5,917 bytes +266‎ No edit summary

20 November 2015

• curprev 11:1211:12, 20 November 2015‎ Jmli talk contribs‎ 5,651 bytes +1,092‎ →‎The Bosch process at the DRIE-Pegasus
• curprev 10:2710:27, 20 November 2015‎ Jmli talk contribs‎ 4,559 bytes +70‎ →‎The Bosch process at the DRIE-Pegasus
• curprev 10:0210:02, 20 November 2015‎ Jmli talk contribs‎ 4,489 bytes +1,139‎ →‎The Bosch process at the DRIE-Pegasus
• curprev 09:5809:58, 20 November 2015‎ Jmli talk contribs‎ 3,350 bytes −143‎ →‎The Bosch process at the DRIE-Pegasus

1 June 2015

• curprev 13:1013:10, 1 June 2015‎ Jmli talk contribs‎ 3,493 bytes +33‎ →‎The Bosch process at the DRIE-Pegasus

26 November 2012

• curprev 10:0710:07, 26 November 2012‎ Jml talk contribs‎ 3,460 bytes +3,460‎ Created page with "== The Bosch process at the DRIE-Pegasus == The DRIE-Pegasus takes the well established Bosch process known from the [[Specific_Process_Knowledge/Etch/ASE_(Advanced_Silicon_E..."