Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Revision history

15 May 2018

• curprev 13:3913:39, 15 May 2018‎ Jmli talk contribs‎ 6,127 bytes +19‎ →‎Improving the Bosch process
• curprev 13:3813:38, 15 May 2018‎ Jmli talk contribs‎ 6,108 bytes +45‎ →‎Improving the Bosch process
• curprev 13:3713:37, 15 May 2018‎ Jmli talk contribs‎ 6,063 bytes +65‎ No edit summary
• curprev 13:3613:36, 15 May 2018‎ Jmli talk contribs‎ 5,998 bytes −32‎ →‎Description of the Bosch process at the DRIE-Pegasus
• curprev 13:3513:35, 15 May 2018‎ Jmli talk contribs‎ 6,030 bytes +48‎ →‎Description of the Bosch process at the DRIE-Pegasus
• curprev 13:3413:34, 15 May 2018‎ Jmli talk contribs‎ 5,982 bytes +37‎ →‎Description of the Bosch process at the DRIE-Pegasus (from 2012)
• curprev 13:3213:32, 15 May 2018‎ Jmli talk contribs‎ 5,945 bytes +28‎ →‎The Bosch process at the DRIE-Pegasus

14 May 2018

• curprev 11:4311:43, 14 May 2018‎ Jmli talk contribs‎ 5,917 bytes +266‎ No edit summary

20 November 2015

• curprev 12:1212:12, 20 November 2015‎ Jmli talk contribs‎ 5,651 bytes +1,092‎ →‎The Bosch process at the DRIE-Pegasus
• curprev 11:2711:27, 20 November 2015‎ Jmli talk contribs‎ 4,559 bytes +70‎ →‎The Bosch process at the DRIE-Pegasus
• curprev 11:0211:02, 20 November 2015‎ Jmli talk contribs‎ 4,489 bytes +1,139‎ →‎The Bosch process at the DRIE-Pegasus
• curprev 10:5810:58, 20 November 2015‎ Jmli talk contribs‎ 3,350 bytes −143‎ →‎The Bosch process at the DRIE-Pegasus

1 June 2015

• curprev 14:1014:10, 1 June 2015‎ Jmli talk contribs‎ 3,493 bytes +33‎ →‎The Bosch process at the DRIE-Pegasus

26 November 2012

• curprev 11:0711:07, 26 November 2012‎ Jml talk contribs‎ 3,460 bytes +3,460‎ Created page with "== The Bosch process at the DRIE-Pegasus == The DRIE-Pegasus takes the well established Bosch process known from the [[Specific_Process_Knowledge/Etch/ASE_(Advanced_Silicon_E..."