Jump to content

Specific Process Knowledge/Etch/Etching of Silicon: Revision history

View logs for this page

Diff selection: Mark the radio buttons of the revisions to compare and hit enter or the button at the bottom.
Legend: (cur) = difference with latest revision, (prev) = difference with preceding revision, m = minor edit.

curprev 14:2814:28, 18 July 2011‎ BGE talk contribs‎ 3,374 bytes +77‎ →‎Dry etches:

curprev 09:3709:37, 31 May 2011‎ Jml talk contribs‎ 3,297 bytes +35‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch, ASE etch and DRIE-Pegasus for etching of Silicon

curprev 14:1714:17, 30 May 2011‎ Jml talk contribs‎ 3,262 bytes +74‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch, ASE etch and DRIE-Pegasus for etching of Silicon
curprev 14:1014:10, 30 May 2011‎ Jml talk contribs‎ 3,188 bytes +490‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon

curprev 08:2008:20, 11 May 2011‎ Jml talk contribs‎ 2,698 bytes +27‎ →‎Dry etches:
curprev 08:1808:18, 11 May 2011‎ Jml talk contribs‎ 2,671 bytes +4‎ →‎Dry etches:
curprev 08:1508:15, 11 May 2011‎ Jml talk contribs‎ 2,667 bytes +47‎ →‎Dry etches:

curprev 13:2413:24, 31 January 2008‎ 192.38.87.76 talk‎ 2,620 bytes +122‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon

curprev 11:1411:14, 15 January 2008‎ BGE talk contribs‎ 2,498 bytes −7‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon
curprev 11:1311:13, 15 January 2008‎ BGE talk contribs‎ 2,505 bytes −2‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon
curprev 09:1709:17, 15 January 2008‎ BGE talk contribs‎ 2,507 bytes 0‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon

curprev 15:2815:28, 19 December 2007‎ Jml talk contribs‎ 2,507 bytes −41‎ No edit summary

curprev 16:2716:27, 19 November 2007‎ BGE talk contribs‎ 2,498 bytes +502‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon
curprev 13:5413:54, 19 November 2007‎ 192.38.87.73 talk‎ 1,996 bytes +57‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon
curprev 13:4313:43, 19 November 2007‎ 192.38.87.73 talk‎ 1,939 bytes +51‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon
curprev 13:3913:39, 19 November 2007‎ 192.38.87.73 talk‎ 1,888 bytes +152‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon

curprev 10:5610:56, 8 November 2007‎ 192.38.87.76 talk‎ 1,736 bytes +15‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon
curprev 10:3810:38, 8 November 2007‎ 192.38.87.76 talk‎ 1,721 bytes +57‎ No edit summary
curprev 10:3410:34, 8 November 2007‎ 192.38.87.76 talk‎ 1,664 bytes +45‎ No edit summary
curprev 10:3110:31, 8 November 2007‎ 192.38.87.76 talk‎ 1,619 bytes +55‎ No edit summary

curprev 11:2611:26, 30 October 2007‎ 192.38.87.76 talk‎ 1,035 bytes +178‎ →‎Comparison of KOH etch, wet PolySilicon etch, RIE etch and ASE etch for etching of Silicon
curprev 11:2311:23, 30 October 2007‎ 192.38.87.76 talk‎ 857 bytes +630‎ No edit summary

curprev 15:2015:20, 29 October 2007‎ BGE talk contribs‎ 227 bytes +227‎ New page: Etch of silicon can be done by either wet etch or dry etch. The standard setups for this here at DANCHIP are: ===Wet etches:=== *KOH etch *Wet PolySilicon etch ===Dry etches:=== *Dry etch...

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/Etching_of_Silicon"