Specific Process Knowledge/Thin film deposition/Deposition of Copper: Revision history

1 October 2012

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15 August 2011

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5 February 2009

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21 November 2007

• curprev 10:4810:48, 21 November 2007‎ 192.38.87.73 talk‎ 478 bytes +478‎ New page: Copper can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="3" ! ! E-beam evaporati...