Specific Process Knowledge/Thin film deposition/Lesker: Revision history

25 August 2014

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27 June 2014

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25 June 2014

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11 March 2014

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28 January 2014

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4 October 2013

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3 June 2013

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28 August 2012

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28 October 2010

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9 November 2009

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• curprev 15:1715:17, 9 November 2009‎ BGE talk contribs‎ 7,309 bytes +5‎ →‎Surface roughness optimization
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• curprev 14:4214:42, 9 November 2009‎ BGE talk contribs‎ 5,755 bytes +1,804‎ →‎Surface roughness optimization
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• curprev 14:2614:26, 9 November 2009‎ BGE talk contribs‎ 2,468 bytes +1,287‎ →‎Film quality optimization
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• curprev 14:1214:12, 9 November 2009‎ BGE talk contribs‎ 1,177 bytes +42‎ →‎Film quality optimization

• curprev 14:1114:11, 9 November 2009‎ BGE talk contribs‎ 1,135 bytes +1,135‎ New page: ==Film quality optimization== The Lesker CMS 18 sputter system can produce films in a wide range of qualities. The quality of a film depends strongly on the substrate (lattice matching), ...