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Specific Process Knowledge/Thin film deposition/Deposition of Copper: Revision history

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curprev 16:0816:08, 21 April 2020‎ Reet talk contribs‎ m 3,322 bytes +189‎ →‎Deposition of Cu: added info on deposition rate

curprev 11:5511:55, 20 April 2020‎ Reet talk contribs‎ 3,133 bytes +504‎ →‎Deposition of Cu: added the cluster sputterer

curprev 14:4814:48, 19 March 2020‎ Reet talk contribs‎ 2,338 bytes +22‎ →‎Studies of Cu deposition processes

curprev 13:4413:44, 17 September 2018‎ Reet talk contribs‎ 2,316 bytes −237‎ No edit summary
curprev 13:4413:44, 17 September 2018‎ Reet talk contribs‎ 2,553 bytes +237‎ →‎Deposition of Cu

curprev 12:5112:51, 29 August 2018‎ Reet talk contribs‎ m 2,316 bytes +8‎ →‎Deposition of Cu
curprev 12:5012:50, 29 August 2018‎ Reet talk contribs‎ m 2,308 bytes +58‎ →‎Deposition of Cu

curprev 08:2008:20, 22 August 2018‎ Choi talk contribs‎ 2,250 bytes −400‎ →‎Deposition of Cu

curprev 09:3809:38, 6 August 2018‎ Reet talk contribs‎ m 2,650 bytes +5‎ →‎Deposition of Cu
curprev 09:3709:37, 6 August 2018‎ Reet talk contribs‎ 2,645 bytes +442‎ →‎Deposition of Cu: removed Alcatel, added Temescal

curprev 10:1410:14, 19 September 2016‎ Paphol talk contribs‎ 2,203 bytes −348‎ →‎Deposition of Cu
curprev 10:1110:11, 19 September 2016‎ Paphol talk contribs‎ 2,551 bytes −182‎ →‎Deposition of Copper using sputter deposition technique

curprev 09:5909:59, 20 October 2014‎ Knil talk contribs‎ 2,317 bytes +7‎ No edit summary

curprev 13:4213:42, 13 October 2014‎ Jehan talk contribs‎ 2,310 bytes +204‎ →‎Deposition of Copper using sputter deposition technique

curprev 09:0409:04, 9 April 2014‎ Knil talk contribs‎ 2,106 bytes −270‎ No edit summary
curprev 08:0808:08, 9 April 2014‎ Knil talk contribs‎ 2,376 bytes +183‎ →‎Deposition of Cu

curprev 15:0915:09, 25 March 2014‎ Knil talk contribs‎ 2,193 bytes +123‎ →‎Deposition of Cu

curprev 08:4508:45, 7 March 2014‎ Knil talk contribs‎ 2,070 bytes +434‎ No edit summary

curprev 12:3412:34, 1 March 2013‎ Kn talk contribs‎ 1,636 bytes −3‎ →‎Deposition of Cu
curprev 11:4411:44, 1 March 2013‎ Kn talk contribs‎ 1,639 bytes +490‎ No edit summary

curprev 14:1314:13, 2 October 2012‎ Kn talk contribs‎ 1,149 bytes +71‎ No edit summary
curprev 14:0214:02, 2 October 2012‎ Kn talk contribs‎ 1,078 bytes +270‎ No edit summary

curprev 14:4414:44, 15 August 2011‎ Kn talk contribs‎ 569 bytes −174‎ No edit summary

curprev 14:3714:37, 5 February 2009‎ BGE talk contribs‎ 743 bytes +120‎ No edit summary

curprev 11:2411:24, 16 December 2008‎ Kn talk contribs‎ 623 bytes +145‎ No edit summary

curprev 10:4810:48, 21 November 2007‎ 192.38.87.73 talk‎ 478 bytes +478‎ New page: Copper can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="3" ! ! E-beam evaporati...

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