Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Revision history

17 March 2020

• curprev 14:0014:00, 17 March 2020‎ Taran talk contribs‎ 12,152 bytes 0‎ →‎Substrate centring and flat alignment
• curprev 13:5913:59, 17 March 2020‎ Taran talk contribs‎ 12,152 bytes 0‎ →‎Substrate centring and flat alignment
• curprev 13:5913:59, 17 March 2020‎ Taran talk contribs‎ 12,152 bytes +24‎ →‎Substrate centring and flat alignment

16 March 2020

• curprev 13:3413:34, 16 March 2020‎ Taran talk contribs‎ 12,128 bytes +87‎ →‎Features
• curprev 09:3409:34, 16 March 2020‎ Taran talk contribs‎ 12,041 bytes +1‎ →‎Features
• curprev 09:3309:33, 16 March 2020‎ Taran talk contribs‎ 12,040 bytes 0‎ →‎Process Parameters
• curprev 09:3309:33, 16 March 2020‎ Taran talk contribs‎ 12,040 bytes 0‎ →‎Features
• curprev 09:3209:32, 16 March 2020‎ Taran talk contribs‎ 12,040 bytes −20‎ →‎Substrate centring and flat alignment
• curprev 09:3209:32, 16 March 2020‎ Taran talk contribs‎ 12,060 bytes +1‎ →‎Alignment
• curprev 09:3209:32, 16 March 2020‎ Taran talk contribs‎ 12,059 bytes +343‎ →‎Substrate centring and flat alignment
• curprev 09:2809:28, 16 March 2020‎ Taran talk contribs‎ 11,716 bytes +6‎ →‎Process Parameters
• curprev 09:2409:24, 16 March 2020‎ Taran talk contribs‎ 11,710 bytes +159‎ →‎Process Parameters
• curprev 09:2009:20, 16 March 2020‎ Taran talk contribs‎ 11,551 bytes +64‎ →‎Substrate centring and flat alignment
• curprev 09:0609:06, 16 March 2020‎ Taran talk contribs‎ 11,487 bytes +1‎ →‎Exposure technology
• curprev 09:0609:06, 16 March 2020‎ Taran talk contribs‎ 11,486 bytes +2‎ →‎Features
• curprev 09:0509:05, 16 March 2020‎ Taran talk contribs‎ 11,484 bytes +89‎ →‎Substrate centring and flat alignment
• curprev 09:0409:04, 16 March 2020‎ Taran talk contribs‎ 11,395 bytes −23‎ →‎Substrate centring and flat alignment
• curprev 09:0309:03, 16 March 2020‎ Taran talk contribs‎ 11,418 bytes +1,547‎ →‎Alignment
• curprev 08:5408:54, 16 March 2020‎ Taran talk contribs‎ 9,871 bytes +1,217‎ →‎Features
• curprev 08:4108:41, 16 March 2020‎ Taran talk contribs‎ 8,654 bytes +25‎ No edit summary
• curprev 08:3608:36, 16 March 2020‎ Taran talk contribs‎ 8,629 bytes +170‎ →‎Process Parameters

13 March 2020

• curprev 12:3412:34, 13 March 2020‎ Taran talk contribs‎ 8,459 bytes 0‎ →‎Process Parameters
• curprev 12:2312:23, 13 March 2020‎ Taran talk contribs‎ 8,459 bytes −206‎ →‎Writing speed
• curprev 12:0812:08, 13 March 2020‎ Taran talk contribs‎ 8,665 bytes +125‎ →‎Writing speed
• curprev 12:0312:03, 13 March 2020‎ Taran talk contribs‎ 8,540 bytes +135‎ →‎Writing speed
• curprev 11:3111:31, 13 March 2020‎ Taran talk contribs‎ 8,405 bytes +1‎ →‎Writing speed
• curprev 11:3111:31, 13 March 2020‎ Taran talk contribs‎ 8,404 bytes +1,626‎ →‎Writing speed
• curprev 11:1211:12, 13 March 2020‎ Taran talk contribs‎ 6,778 bytes −89‎ →‎Acceptance test
• curprev 10:0610:06, 13 March 2020‎ Taran talk contribs‎ 6,867 bytes +4‎ →‎Process Parameters
• curprev 10:0510:05, 13 March 2020‎ Taran talk contribs‎ 6,863 bytes −54‎ →‎Process Parameters
• curprev 10:0510:05, 13 March 2020‎ Taran talk contribs‎ 6,917 bytes −25‎ →‎Process Parameters
• curprev 09:5309:53, 13 March 2020‎ Taran talk contribs‎ 6,942 bytes +88‎ →‎Process Parameters
• curprev 09:4709:47, 13 March 2020‎ Taran talk contribs‎ 6,854 bytes +39‎ →‎Acceptance test
• curprev 09:4609:46, 13 March 2020‎ Taran talk contribs‎ 6,815 bytes −590‎ →‎Process Parameters
• curprev 09:3809:38, 13 March 2020‎ Taran talk contribs‎ 7,405 bytes +1,938‎ →‎Process Parameters
• curprev 09:3709:37, 13 March 2020‎ Taran talk contribs‎ 5,467 bytes +82‎ →‎Acceptance test
• curprev 09:3409:34, 13 March 2020‎ Taran talk contribs‎ 5,385 bytes +198‎ →‎Acceptance test
• curprev 09:3209:32, 13 March 2020‎ Taran talk contribs‎ 5,187 bytes +555‎ →‎Acceptance test
• curprev 09:2909:29, 13 March 2020‎ Taran talk contribs‎ 4,632 bytes −30‎ →‎Writing speed
• curprev 09:2909:29, 13 March 2020‎ Taran talk contribs‎ 4,662 bytes +29‎ →‎Acceptance test
• curprev 09:2609:26, 13 March 2020‎ Taran talk contribs‎ 4,633 bytes +1,799‎ →‎Process Parameters

18 February 2020

• curprev 22:3322:33, 18 February 2020‎ Taran talk contribs‎ 2,834 bytes +14‎ →‎Exposure mode

14 February 2020

• curprev 16:2616:26, 14 February 2020‎ Taran talk contribs‎ 2,820 bytes +64‎ →‎Exposure mode
• curprev 16:2416:24, 14 February 2020‎ Taran talk contribs‎ 2,756 bytes +11‎ →‎Exposure mode

13 February 2020

• curprev 11:1111:11, 13 February 2020‎ Taran talk contribs‎ 2,745 bytes 0‎ →‎Exposure technology
• curprev 11:1111:11, 13 February 2020‎ Taran talk contribs‎ 2,745 bytes −5‎ →‎Exposure technology
• curprev 11:1111:11, 13 February 2020‎ Taran talk contribs‎ 2,750 bytes −9‎ →‎Exposure mode
• curprev 10:5110:51, 13 February 2020‎ Taran talk contribs‎ 2,759 bytes +785‎ No edit summary
• curprev 10:4910:49, 13 February 2020‎ Taran talk contribs‎ 1,974 bytes +22‎ No edit summary
• curprev 10:4810:48, 13 February 2020‎ Taran talk contribs‎ 1,952 bytes +1,952‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lit..."