Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Revision history

14 November 2012

• curprev 07:4607:46, 14 November 2012‎ Khr talk contribs‎ 2,758 bytes +19‎ No edit summary

13 November 2012

• curprev 08:0308:03, 13 November 2012‎ Khr talk contribs‎ 2,739 bytes 0‎ →‎Endpoint detection with SIMS
• curprev 08:0308:03, 13 November 2012‎ Khr talk contribs‎ 2,739 bytes 0‎ →‎Some SEM profile images of the etched stacks

12 November 2012

• curprev 10:5610:56, 12 November 2012‎ Khr talk contribs‎ 2,739 bytes −24‎ →‎Process parameters for the acceptance test

8 November 2012

• curprev 12:5112:51, 8 November 2012‎ Khr talk contribs‎ 2,763 bytes 0‎ →‎Endpoint detection with SIMS
• curprev 12:4912:49, 8 November 2012‎ Khr talk contribs‎ 2,763 bytes −1‎ →‎Process parameters for the acceptance test

29 October 2012

• curprev 09:2309:23, 29 October 2012‎ Khr talk contribs‎ 2,764 bytes +406‎ →‎Some SEM profile images of the etched stacks
• curprev 09:1009:10, 29 October 2012‎ Khr talk contribs‎ 2,358 bytes +51‎ →‎Process parameters for the acceptance test
• curprev 09:0009:00, 29 October 2012‎ Khr talk contribs‎ 2,307 bytes +2‎ →‎Process parameters for the acceptance test
• curprev 09:0009:00, 29 October 2012‎ Khr talk contribs‎ 2,305 bytes −2‎ →‎Process parameters for the acceptance test
• curprev 08:5908:59, 29 October 2012‎ Khr talk contribs‎ 2,307 bytes −5‎ →‎Process parameters for the acceptance test
• curprev 08:5908:59, 29 October 2012‎ Khr talk contribs‎ 2,312 bytes +1‎ →‎Process parameters for the acceptance test
• curprev 08:5908:59, 29 October 2012‎ Khr talk contribs‎ 2,311 bytes +12‎ →‎Process parameters for the acceptance test
• curprev 08:5708:57, 29 October 2012‎ Khr talk contribs‎ 2,299 bytes +6‎ →‎Process parameters for the acceptance test
• curprev 08:5408:54, 29 October 2012‎ Khr talk contribs‎ 2,293 bytes +2‎ →‎Process parameters for the acceptance test

9 October 2012

• curprev 07:4207:42, 9 October 2012‎ Khr talk contribs‎ 2,291 bytes +201‎ →‎Process parameters for the acceptance test
• curprev 07:4007:40, 9 October 2012‎ Khr talk contribs‎ 2,090 bytes 0‎ No edit summary
• curprev 07:3607:36, 9 October 2012‎ Khr talk contribs‎ 2,090 bytes 0‎ No edit summary
• curprev 07:3607:36, 9 October 2012‎ Khr talk contribs‎ 2,090 bytes +11‎ No edit summary
• curprev 07:3307:33, 9 October 2012‎ Khr talk contribs‎ 2,079 bytes −1‎ No edit summary
• curprev 07:3307:33, 9 October 2012‎ Khr talk contribs‎ 2,080 bytes +2‎ No edit summary
• curprev 07:3207:32, 9 October 2012‎ Khr talk contribs‎ 2,078 bytes +4‎ No edit summary
• curprev 07:3107:31, 9 October 2012‎ Khr talk contribs‎ 2,074 bytes +62‎ No edit summary
• curprev 07:0807:08, 9 October 2012‎ Khr talk contribs‎ 2,012 bytes +113‎ No edit summary

8 October 2012

• curprev 13:0813:08, 8 October 2012‎ Khr talk contribs‎ 1,899 bytes +141‎ No edit summary

27 September 2012

• curprev 14:2414:24, 27 September 2012‎ Khr talk contribs‎ 1,758 bytes −40‎ →‎Endpoint detection with SIMS
• curprev 14:2314:23, 27 September 2012‎ Khr talk contribs‎ 1,798 bytes +84‎ →‎Endpoint detection with SIMS
• curprev 14:2114:21, 27 September 2012‎ Khr talk contribs‎ 1,714 bytes +2‎ →‎Endpoint detection with SIMS
• curprev 14:2114:21, 27 September 2012‎ Khr talk contribs‎ 1,712 bytes +50‎ No edit summary
• curprev 14:2014:20, 27 September 2012‎ Khr talk contribs‎ 1,662 bytes −7‎ →‎Endpoint detection with SIMS
• curprev 14:2014:20, 27 September 2012‎ Khr talk contribs‎ 1,669 bytes +5‎ →‎Endpoint detection with SIMS
• curprev 14:1914:19, 27 September 2012‎ Khr talk contribs‎ 1,664 bytes +2‎ →‎Endpoint detection with SIMS
• curprev 14:1914:19, 27 September 2012‎ Khr talk contribs‎ 1,662 bytes −2‎ →‎Endpoint detection with SIMS
• curprev 14:1914:19, 27 September 2012‎ Khr talk contribs‎ 1,664 bytes +4‎ →‎Endpoint detection with SIMS
• curprev 14:1414:14, 27 September 2012‎ Khr talk contribs‎ 1,660 bytes −1‎ →‎Endpoint detection with SIMS
• curprev 14:1014:10, 27 September 2012‎ Khr talk contribs‎ 1,661 bytes +523‎ No edit summary
• curprev 14:0914:09, 27 September 2012‎ Khr talk contribs‎ 1,138 bytes −2‎ →‎Process parameters for the acceptance test
• curprev 14:0814:08, 27 September 2012‎ Khr talk contribs‎ 1,140 bytes +77‎ No edit summary
• curprev 14:0814:08, 27 September 2012‎ Khr talk contribs‎ 1,063 bytes −359‎ No edit summary
• curprev 14:0714:07, 27 September 2012‎ Khr talk contribs‎ 1,422 bytes +200‎ →‎Some SEM profile images of the etched stacks
• curprev 14:0514:05, 27 September 2012‎ Khr talk contribs‎ 1,222 bytes −1‎ →‎Some SEM profile images of the etched stacks
• curprev 14:0514:05, 27 September 2012‎ Khr talk contribs‎ 1,223 bytes +5‎ →‎Some SEM profile images of the etched Ti
• curprev 14:0214:02, 27 September 2012‎ Khr talk contribs‎ 1,218 bytes −131‎ →‎Some SEM profile images of the etched Ti
• curprev 13:5813:58, 27 September 2012‎ Khr talk contribs‎ 1,349 bytes +1‎ →‎Some SEM profile images of the etched Ti
• curprev 13:2613:26, 27 September 2012‎ Khr talk contribs‎ 1,348 bytes +49‎ →‎Some SEM profile images of the etched Ti
• curprev 13:2013:20, 27 September 2012‎ Khr talk contribs‎ 1,299 bytes +1‎ →‎Process parameters for the acceptance test
• curprev 13:2013:20, 27 September 2012‎ Khr talk contribs‎ 1,298 bytes +36‎ →‎Process parameters for the acceptance test
• curprev 12:4412:44, 27 September 2012‎ Khr talk contribs‎ 1,262 bytes −2,023‎ →‎Results from the acceptance test in February 2011
• curprev 12:3912:39, 27 September 2012‎ Khr talk contribs‎ 3,285 bytes +2,982‎ No edit summary
• curprev 11:3911:39, 27 September 2012‎ Khr talk contribs‎ 303 bytes +303‎ New page: End point detection is achieved by SIMS, and the etch rate is approximately 25 Nm/min. Resist stripping can be hard due to burned resist, to remedy this try to lover the current; this will...