Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Revision history

17 December 2013

• curprev 11:5511:55, 17 December 2013‎ Jmli talk contribs‎ 6,971 bytes −3‎ No edit summary
• curprev 11:5511:55, 17 December 2013‎ Jmli talk contribs‎ 6,974 bytes +2‎ →‎Process A
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• curprev 10:1710:17, 17 December 2013‎ Jmli talk contribs‎ 7,907 bytes +2‎ →‎Process A guidelines
• curprev 10:1110:11, 17 December 2013‎ Jmli talk contribs‎ 7,905 bytes +11‎ →‎Quality control procedure
• curprev 10:0410:04, 17 December 2013‎ Jmli talk contribs‎ 7,894 bytes −5‎ →‎Quality control procedure
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• curprev 10:0110:01, 17 December 2013‎ Jmli talk contribs‎ 7,901 bytes −112‎ →‎Quality control procedure
• curprev 09:5809:58, 17 December 2013‎ Jmli talk contribs‎ 8,013 bytes −1‎ →‎Quality control procedure
• curprev 09:5609:56, 17 December 2013‎ Jmli talk contribs‎ 8,014 bytes −57‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 09:5509:55, 17 December 2013‎ Jmli talk contribs‎ 8,071 bytes −26‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 09:5409:54, 17 December 2013‎ Jmli talk contribs‎ 8,097 bytes +3‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 09:5409:54, 17 December 2013‎ Jmli talk contribs‎ 8,094 bytes +13‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 09:5309:53, 17 December 2013‎ Jmli talk contribs‎ 8,081 bytes −7‎ →‎QC template - try to make you QC recipe + limits look as much as possible like this
• curprev 09:5009:50, 17 December 2013‎ Jmli talk contribs‎ 8,088 bytes +617‎ No edit summary
• curprev 09:4709:47, 17 December 2013‎ Jmli talk contribs‎ 7,471 bytes +1,048‎ →‎Process A

3 October 2013

• curprev 15:2815:28, 3 October 2013‎ Jmli talk contribs‎ 6,423 bytes +216‎ No edit summary

16 May 2013

• curprev 12:3012:30, 16 May 2013‎ Jmli talk contribs‎ 6,207 bytes +224‎ →‎Process A guidelines
• curprev 12:1912:19, 16 May 2013‎ Jmli talk contribs‎ 5,983 bytes +325‎ →‎Process A guidelines
• curprev 12:0812:08, 16 May 2013‎ Jmli talk contribs‎ 5,658 bytes +231‎ →‎Process A guidelines
• curprev 12:0312:03, 16 May 2013‎ Jmli talk contribs‎ 5,427 bytes +208‎ →‎Process A guidelines
• curprev 11:0711:07, 16 May 2013‎ Jmli talk contribs‎ 5,219 bytes +88‎ →‎Process A guidelines
• curprev 10:5410:54, 16 May 2013‎ Jmli talk contribs‎ 5,131 bytes −64‎ →‎Process A guidelines
• curprev 10:4410:44, 16 May 2013‎ Jmli talk contribs‎ 5,195 bytes +177‎ →‎Process A performance

8 March 2013

• curprev 13:3113:31, 8 March 2013‎ Jml talk contribs‎ 5,018 bytes 0‎ →‎Results: Etched depths in trenches of different widths

20 February 2013

• curprev 14:0114:01, 20 February 2013‎ Jml talk contribs‎ 5,018 bytes 0‎ →‎Results: Etched depths in trenches of different widths
• curprev 14:0114:01, 20 February 2013‎ Jml talk contribs‎ 5,018 bytes 0‎ →‎Results: Etched depths in trenches of different widths
• curprev 14:0014:00, 20 February 2013‎ Jml talk contribs‎ 5,018 bytes +244‎ →‎Results: Optical images

4 February 2013

• curprev 19:5419:54, 4 February 2013‎ Jml talk contribs‎ 4,774 bytes +29‎ →‎Results: Optical images
• curprev 14:1514:15, 4 February 2013‎ Jml talk contribs‎ 4,745 bytes +32‎ →‎Results: Optical images
• curprev 14:1314:13, 4 February 2013‎ Jml talk contribs‎ 4,713 bytes −5‎ →‎Results: Optical images
• curprev 14:1214:12, 4 February 2013‎ Jml talk contribs‎ 4,718 bytes +185‎ →‎Results: Optical images
• curprev 14:0914:09, 4 February 2013‎ Jml talk contribs‎ 4,533 bytes +33‎ →‎Results: Optical images
• curprev 13:5713:57, 4 February 2013‎ Jml talk contribs‎ 4,500 bytes +221‎ →‎Results: Optical images
• curprev 12:3112:31, 4 February 2013‎ Jml talk contribs‎ 4,279 bytes +272‎ →‎Results: Optical images
• curprev 12:0612:06, 4 February 2013‎ Jml talk contribs‎ 4,007 bytes +33‎ →‎Results
• curprev 12:0112:01, 4 February 2013‎ Jml talk contribs‎ 3,974 bytes 0‎ →‎Results
• curprev 12:0012:00, 4 February 2013‎ Jml talk contribs‎ 3,974 bytes +429‎ →‎Results
• curprev 11:5811:58, 4 February 2013‎ Jml talk contribs‎ 3,545 bytes 0‎ →‎Results
• curprev 11:5711:57, 4 February 2013‎ Jml talk contribs‎ 3,545 bytes +154‎ →‎Results
• curprev 11:5311:53, 4 February 2013‎ Jml talk contribs‎ 3,391 bytes +437‎ →‎Process A performance
• curprev 11:2211:22, 4 February 2013‎ Jml talk contribs‎ 2,954 bytes +52‎ →‎Experiment
• curprev 10:5510:55, 4 February 2013‎ Jml talk contribs‎ 2,902 bytes +28‎ →‎Experiment
• curprev 10:5410:54, 4 February 2013‎ Jml talk contribs‎ 2,874 bytes +173‎ →‎Experiment
• curprev 10:5210:52, 4 February 2013‎ Jml talk contribs‎ 2,701 bytes +1,002‎ →‎Process A performance
• curprev 10:4610:46, 4 February 2013‎ Jml talk contribs‎ 1,699 bytes +127‎ →‎Process A
• curprev 10:3910:39, 4 February 2013‎ Jml talk contribs‎ 1,572 bytes +89‎ →‎Process A

26 November 2012

• curprev 11:5911:59, 26 November 2012‎ Jml talk contribs‎ 1,483 bytes +170‎ No edit summary

5 July 2011

• curprev 10:0410:04, 5 July 2011‎ Jml talk contribs‎ 1,313 bytes +1,313‎ New page: {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" |+ '''Process A specifications''' |- ! Parameter ! Specification ! Average result |- ! Etch rate (µm/min) | > 1...