Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Revision history

11 September 2023

• curprev 11:5411:54, 11 September 2023‎ Bghe talk contribs‎ 6,093 bytes +266‎ →‎Testing with electromagnetic coils
• curprev 08:2408:24, 11 September 2023‎ Bghe talk contribs‎ 5,827 bytes +20‎ →‎Results with SiO2_res_10 and EM
• curprev 08:2308:23, 11 September 2023‎ Bghe talk contribs‎ 5,807 bytes +97‎ →‎Results with SiO2_res_10 and EM
• curprev 08:2208:22, 11 September 2023‎ Bghe talk contribs‎ 5,710 bytes +18‎ →‎Uniformity results with SiO2_res_10
• curprev 08:2108:21, 11 September 2023‎ Bghe talk contribs‎ 5,692 bytes +39‎ →‎Uniformity results with SiO2_res_10
• curprev 08:1808:18, 11 September 2023‎ Bghe talk contribs‎ 5,653 bytes +170‎ →‎Uniformity results with SiO2_res_10
• curprev 08:1508:15, 11 September 2023‎ Bghe talk contribs‎ 5,483 bytes +1‎ →‎Uniformity results with SiO2_res_10
• curprev 08:1308:13, 11 September 2023‎ Bghe talk contribs‎ 5,482 bytes +232‎ →‎Uniformity results with SiO2_res_10
• curprev 08:1208:12, 11 September 2023‎ Bghe talk contribs‎ 5,250 bytes +118‎ →‎Uniformity results with SiO2_res_10

4 September 2023

• curprev 09:4909:49, 4 September 2023‎ Bghe talk contribs‎ 5,132 bytes +1‎ →‎Uniformity results with SiO2_res_10
• curprev 09:4709:47, 4 September 2023‎ Bghe talk contribs‎ 5,131 bytes +5‎ →‎Uniformity results with SiO2_res_10 Tag: Manual revert
• curprev 09:4609:46, 4 September 2023‎ Bghe talk contribs‎ 5,126 bytes −5‎ →‎Uniformity results with SiO2_res_10 Tag: Reverted
• curprev 09:4609:46, 4 September 2023‎ Bghe talk contribs‎ 5,131 bytes +215‎ No edit summary

23 August 2023

• curprev 14:2114:21, 23 August 2023‎ Bghe talk contribs‎ 4,916 bytes +1‎ →‎Testing with electromagnetic coils
• curprev 14:2014:20, 23 August 2023‎ Bghe talk contribs‎ 4,915 bytes +4‎ →‎Testing with electromagnetic coils
• curprev 13:4013:40, 23 August 2023‎ Bghe talk contribs‎ 4,911 bytes +9‎ →‎Testing with electromagnetic coils

22 August 2023

• curprev 10:1110:11, 22 August 2023‎ Bghe talk contribs‎ 4,902 bytes +19‎ →‎Uniformity results with SiO2_res_10
• curprev 10:1010:10, 22 August 2023‎ Bghe talk contribs‎ 4,883 bytes +118‎ →‎Uniformity results with SiO2_res_10
• curprev 09:5809:58, 22 August 2023‎ Bghe talk contribs‎ 4,765 bytes +43‎ →‎SiO2 Etch using resist as masking material

27 July 2023

• curprev 14:0514:05, 27 July 2023‎ Bghe talk contribs‎ 4,722 bytes +40‎ →‎Testing with electromagnetic coils
• curprev 14:0414:04, 27 July 2023‎ Bghe talk contribs‎ 4,682 bytes +29‎ →‎Testing with electromagnetic coils
• curprev 14:0214:02, 27 July 2023‎ Bghe talk contribs‎ 4,653 bytes +53‎ →‎Testing with electromagnetic coils
• curprev 13:5313:53, 27 July 2023‎ Bghe talk contribs‎ 4,600 bytes +1‎ →‎Testing with electromagnetic coils
• curprev 13:5313:53, 27 July 2023‎ Bghe talk contribs‎ 4,599 bytes +400‎ →‎Testing with electromagnetic coils
• curprev 13:4413:44, 27 July 2023‎ Bghe talk contribs‎ 4,199 bytes +6‎ →‎Testing with electromagnetic coils
• curprev 13:4313:43, 27 July 2023‎ Bghe talk contribs‎ 4,193 bytes +5‎ →‎Testing with electromagnetic coils
• curprev 13:4313:43, 27 July 2023‎ Bghe talk contribs‎ 4,188 bytes +70‎ →‎Testing with electromagnetic coils
• curprev 13:4013:40, 27 July 2023‎ Bghe talk contribs‎ 4,118 bytes −12‎ →‎Testing with electromagnetic coils
• curprev 13:3713:37, 27 July 2023‎ Bghe talk contribs‎ 4,130 bytes +61‎ →‎Testing with electromagnetic coils
• curprev 13:3313:33, 27 July 2023‎ Bghe talk contribs‎ 4,069 bytes +239‎ →‎Testing with electromagnetic coils
• curprev 13:3013:30, 27 July 2023‎ Bghe talk contribs‎ 3,830 bytes −1‎ →‎Testing with electromagnetic coils
• curprev 13:3013:30, 27 July 2023‎ Bghe talk contribs‎ 3,831 bytes +433‎ →‎Testing with electromagnetic coils
• curprev 13:2513:25, 27 July 2023‎ Bghe talk contribs‎ 3,398 bytes +9‎ →‎Testing with electromagnetic coils
• curprev 13:0813:08, 27 July 2023‎ Bghe talk contribs‎ 3,389 bytes +357‎ →‎Testing with electromagnetic coils
• curprev 13:0313:03, 27 July 2023‎ Bghe talk contribs‎ 3,032 bytes +40‎ No edit summary

3 February 2023

• curprev 11:2811:28, 3 February 2023‎ Bghe talk contribs‎ 2,992 bytes +19‎ →‎SiO2 Etch using aSi as masking material
• curprev 11:2711:27, 3 February 2023‎ Bghe talk contribs‎ 2,973 bytes −65‎ →‎SiO2 Etch using resist as masking material

27 January 2023

• curprev 11:4411:44, 27 January 2023‎ Bghe talk contribs‎ 3,038 bytes +162‎ →‎SiO2 Etch using resist as masking material

1 December 2022

• curprev 15:1815:18, 1 December 2022‎ Bghe talk contribs‎ 2,876 bytes +2‎ →‎DUV optimization

27 April 2021

• curprev 14:3914:39, 27 April 2021‎ Bghe talk contribs‎ 2,874 bytes +33‎ →‎SiO2 Etch using resist as masking material
• curprev 14:3814:38, 27 April 2021‎ Bghe talk contribs‎ 2,841 bytes +90‎ →‎SiO2 Etch using resist as masking material

23 April 2021

• curprev 19:5819:58, 23 April 2021‎ Bghe talk contribs‎ 2,751 bytes 0‎ →‎DUV optimisation
• curprev 17:2617:26, 23 April 2021‎ Bghe talk contribs‎ 2,751 bytes 0‎ →‎DUV optimisation
• curprev 17:2417:24, 23 April 2021‎ Bghe talk contribs‎ 2,751 bytes +1,531‎ →‎SiO2 Etch

5 February 2021

• curprev 08:3708:37, 5 February 2021‎ Bghe talk contribs‎ 1,220 bytes +1‎ →‎SiO2 Etch
• curprev 08:3608:36, 5 February 2021‎ Bghe talk contribs‎ 1,219 bytes +25‎ →‎SiO2 Etch
• curprev 08:3408:34, 5 February 2021‎ Bghe talk contribs‎ 1,194 bytes 0‎ →‎SiO2 Etch
• curprev 08:3408:34, 5 February 2021‎ Bghe talk contribs‎ 1,194 bytes +16‎ →‎SiO2 Etch
• curprev 08:3308:33, 5 February 2021‎ Bghe talk contribs‎ 1,178 bytes +382‎ No edit summary
• curprev 08:2908:29, 5 February 2021‎ Bghe talk contribs‎ 796 bytes +796‎ Created page with "<gallery caption="Recipe no. 10: C06445_02 coil_2500W, platen:300W, He/C4F8= 17.5, C4F8/H2=1, Pressure:8.8mTorr, C4F8:25.6sccm, He:448.7sccm, H2:25.6sccm, 3:56 min " perrow="8..."