View source for Template:SEM comparison table 314

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! Equipment
<!-- ![[Specific Process Knowledge/Characterization/SEM Inspect S|SEM Inspect S]] -->
![[LabAdviser/314/Microscopy 314-307/SEM/Nova|Nova]]
![[LabAdviser/314/Microscopy 314-307/SEM/QFEG|QFEG]]
![[LabAdviser/314/Microscopy 314-307/SEM/AFEG|AFEG]]
![[LabAdviser/314/Microscopy 314-307/FIB/Helios|Helios]]
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!Purpose
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*Conductive samples in High Vac
*Charge reduction in Low Vac
*X Ray Analysis with EDS and WDS -->
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*Conductive samples in High Vac
*Charge reduction in Low Vac
*X Ray Analysis with EDS
*Crystallographic analysis using EBSD and both On and Off axis TKD
* In-situ experiments with Heating and Gas injection
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*Conductive samples in High Vac
*Charge reduction in Low Vac
*Environmental control using Peltier stage
*Cryogenic sample fixing/stabilization using cryo stage
*X Ray Analysis with EDS
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*Conductive samples in High Vac
*Charge reduction in Low Vac
*X Ray Analysis with EDS and WDS
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*Conductive samples in High Vac
*Micro and Nano milling/fabrication using various gases and FIB
*X Ray Analysis with EDS
*Crystallographic analysis using EBSD and Off Axis TKD
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!Equipment position
<!-- |CEN Building 314 -->
|Building 314 Room 060
|Building 314 Room 011
|Building 314 Room 034
|Building 314 Room 061
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|style="background:Whitesmoke; color:black" rowspan="2" align="left" valign="top" |'''Resolution'''
|style="background:Whitesmoke; color:black" colspan="5" align="center" valign="top"| The resolution of a SEM is strongly dependent on sample type and the operator. Resolution quoted is using sputtered gold on carbon
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* High-vacuum
**3.0nm at 30kV (SE)
**10nm at 3kV (SE)
**4.0nm at 30kV (BSE)
* Low-vacuum
**3.0nm at 30kV (SE)
** 4.0nm at 30kV (BSE)
** > 12nm at 3kV (SE) -->
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*High Vacuum operation in Mode II:
**1.0 nm at 15 kV (TLD detector and optimum working distance)
**1.8 nm at 1 kV (TLD detector and optimum working distance)
*Low Vacuum operation in Mode II:
**1.5 nm at 10 kV (Helix detector and optimum working distance)
**1.8 nm at 3 kV (Helix detector and optimum working distance)
 
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* High vacuum 
**0.8 nm at 30 kV (STEM)
**1.0 nm at 30 kV (SE) 
**2.5 nm at 30 kV (BSE) - 3.0 nm at 1 kV (SE) 
*High vacuum with beam deceleration option 
**3.0 nm at 1 kV (BD mode + BSE) 

* Low vacuum - 1.4 nm at 30 kV (SE) 
**2.5 nm at 30 kV (BSE) 
**3.0 nm at 3 kV (SE) 
* Extended vacuum mode (ESEM) 
**1.4 nm at 30 kV (SE)
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* High vacuum 
**0.8 nm at 30 kV (STEM)
**1.0 nm at 30 kV (SE) 
**2.5 nm at 30 kV (BSE) - 3.0 nm at 1 kV (SE) 
*High vacuum with beam deceleration option 
**3.0 nm at 1 kV (BD mode + BSE) 

* Low vacuum - 1.4 nm at 30 kV (SE) 
**2.5 nm at 30 kV (BSE) 
**3.0 nm at 3 kV (SE) 
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* Electron Column Operation in Mode II
**0.8nm @15kV
**0.9nm @1kV
* Ion Column
**4.5nm @ 30kV
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!Detectors
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*ETD Secondary Electrons 
*BSED Back Scatter Electrons 
*LVD/LFD Low Vac SE
*EDS X Ray by energy
*WDS X Ray by wavelength
*STEM Scanning Transmission Electron Microscopy -->
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*ETD/TLD Secondary Electrons
*BSED Back Scatter Electrons
*LVD/LFD Low Vac SE
*Helix Low Vac SE
*EDS X Ray by energy
*EBSD Electron Back Scatter Diffraction
*TKD Transmission Kikuchi Diffraction
*STEM Scanning Transmission Electron Microscopy
*GAD Low Vac BSED
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*ETD Secondary Electrons
*BSED Back Scatter Electrons 
*LVD/LFD Low Vac SE 
*GSED ESEM SE
*EDS X Ray by energy
*STEM Scanning Transmission Electron Microscopy
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*ETD Secondary Electrons
*BSED Back Scatter Electrons 
*LVD/LFD Low Vac SE 
*GSED ESEM SE
*EDS X Ray by energy
*STEM Scanning Transmission Electron Microscopy
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*ETD/TLD Secondary Electrons
*ABS Annular BSED
*EDS X Ray by energy
*EBSD Electron Back Scatter Diffraction 
*CDEM Continuos Dinode Electron Multiplier
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!Stage specifications
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* X 50mm
* Y 50mm
* Z 50mm
* R 360⁰
* T 70⁰ Manual -->
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* X 150mm Piezo
* Y 150mm Piezo
* Z 10mm
* R 360⁰ Piezo
* T 70⁰
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* X 50mm
* Y 50mm
* Z 50mm
* R 360⁰
* T 70⁰ Manual
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* X 50mm
* Y 50mm
* Z 50mm
* R 360⁰
* T 70⁰ Manual
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* X 150mm Piezo
* Y 150mm Piezo
* Z 10mm
* R 360⁰ Piezo
* T 70⁰
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!Options
<!-- | A -->
| B
| C
| D
| E
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!Max sample size
|style="background:Whitesmoke; color:black" colspan="5" align="center"| Consult with DTU Nanolab staff as weight, dimensions, pumping capacity and technique all play a roll in the sample size
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