View source for Specific Process Knowledge/Pattern Design/Travka/fields/Tridge

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== The T-ridge field ==
<!--Checked for updates on 30/7-2018 - ok/jmli -->
The T-ridge fields contain a triple ridge structure for a number of different ridge widths. The triple ridge structure is shown in the image. [[Image:T-ridge2.jpg |500x500px|thumb|Definition of the measures used in the table below]] It consists of three ridges of a certain width. The two trenches between them have the same width. The three ridges are separated by an etched area that is five times the ridge width. This parameters of this feature is not changed in the different Travka masks. In order to vary the exposed area on each Travka mask a masked area (in the figure called 'space') is added between every feature.

=== Travka 05 T-ridge field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 05: T-ridge 2 µm to 6 µm features'''
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|- 
|2||10||10||450||480||2||960
|-
|3||15||15||675||720||1||1680
|-
|4||20||20||900||960||1||2640
|-
|5||25||25||1125||1200||1||3840
|-
|6||30||30||1350||1440||1||5280

|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 05: T-ridge 8 µm to 20 µm features'''
|-
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|8||40||40||1800||1920||1||7200
|-
|10||50||50||2250||2400||1||9600
|-
|15||75||75||3375||3600||1||13200
|-
|20||100||100||4500||4800||1||18000
|}
|}


=== Travka 10 T-ridge field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 10: T-ridge 2 µm to 6 µm features'''
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|- 
|2||10||10||210,0||240||3||720
|-
|3||15||15||315,0||360||3||1800
|-
|4||20||20||420,0||480||3||3240
|-
|5||25||25||525,0||600||3||5040
|-
|6||30||30||630,0||720||3||7200
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 10: T-ridge 8 µm to 20 µm features'''
|-
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|8||40||40||840,0||960||2||9120
|-
|10||50||50||1050,0||1200||2||11520
|-
|15||75||75||1575,0||1800||2||15120
|-
|20||100||100||2100,0||2400||2||19920
|}
|}

=== Travka 20 T-ridge field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 20: T-ridge 2 µm to 6 µm features'''
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|- 
|2||10||10||90,0||120||5||600
|-
|3||15||15||135,0||180||6||1680
|-
|4||20||20||180,0||240||5||2880
|-
|5||25||25||225,0||300||5||4380
|-
|6||30||30||270,0||360||5||6180
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 20: T-ridge 8 µm to 20 µm features'''
|-
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|8||40||40||360,0||480||5||8580
|-
|10||50||50||450,0||600||5||11580
|-
|15||75||75||675,0||900||4||15180
|-
|20||100||100||900,0||1200||4||19980
|}
|}


=== Travka 35 T-ridge field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 35: T-ridge 2 µm to 6 µm features'''
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|- 
|2||10||10||38,6||68,5||7||480
|-
|3||15||15||57,9||102,9||7||1200
|-
|4||20||20||77,1||137,1||9||2434
|-
|5||25||25||96,4||171,4||8||3805
|-
|6||30||30||115,7||205,7||8||5451
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 35: T-ridge 8 µm to 20 µm features'''
|-
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|8||40||40||154,3||274,3||8||7646
|-
|10||50||50||192,9||342,9||8||10389
|-
|15||75||75||289,3||514,3||8||14503
|-
|20||100||100||385,7||685,7||8||19989
|}
|}


=== Travka 50 T-ridge field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 50: T-ridge 2 µm to 6 µm features'''
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|2||10||10||18,0||48||13||624
|-
|3||15||15||27,0||72||12||1488
|-
|4||20||20||36,0||96||12||2640
|-
|5||25||25||45,0||120||12||4080
|-
|6||30||30||54,0||144||12||5808
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 50: T-ridge 8 µm to 20 µm features'''
|-
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|8||40||40||72,0||192||12||8112
|-
|10||50||50||90,0||240||11||10752
|-
|15||75||75||135,0||360||11||14712
|-
|20||100||100||180,0||480||11||19992
|}
|}

=== Travka 65 T-ridge field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 65: T-ridge 2 µm to 6 µm features'''
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|2||10||10||6,9||36,9||16||590,8
|-
|3||15||15||10,4||55,4||17||1532,3
|-
|4||20||20||13,8||73,8||15||2640
|-
|5||25||25||17,3||92,3||15||4024,6
|-
|6||30||30||20,8||110,8||15||5686,2
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 65: T-ridge 8 µm to 20 µm features'''
|-
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|8||40||40||27,7||147,7||15||7901,5
|-
|10||50||50||34,6||184,6||15||10670,8
|-
|15||75||75||51,9||276,9||15||14824,6
|-
|20||100||100||69,2||369,2||14||19993,8
|}
|}

=== Travka 80 T-ridge field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 80: T-ridge 2 µm to 6 µm features'''
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|2||10||10||0||30||18||540
|-
|3||15||15||0||45||20||1440
|-
|4||20||20||0||60||18||2520
|-
|5||25||25||0||75||18||3870
|-
|6||30||30||0||90||18||5490
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 80: T-ridge 8 µm to 20 µm features'''
|-
! width="50" |Width (µm)
! width="50" |Triple width (µm)
! width="50" |Area (µm)
! width="50" |Space (µm)
! width="50" |Total feature width (µm)
! width="50" |Number of features
! width="50" |Total width (µm)
|-
|8||40||40||0||120||18||7650
|-
|10||50||50||0||150||18||10350
|-
|15||75||75||0||225||18||14400
|-
|20||100||100||0||300||18||19800
|}
|}