View source for Specific Process Knowledge/Lithography/ZEP520A



This is a standard positive resist from ZEON. The resist is very expensive; DTU Nanolab has thus stopped buying this resist. 
Use CSAR instead.

== Spin Curves ==


[[File:SpinCurveZEP520A.png|right|700px]]


The thickness is measured on VASE Ellipsometer using a simple Cauchy model for a transparent polymer on a Si wafer with native oxide. The measurements are performed at one incidence angle (70 degrees) only. 9 points on each 4" wafer has been measured; the standard deviation thus represents the homogeinity of the film on the 4" wafers.

{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  style="width: 40%"
|-

|-
|-style="background:Black; color:White"
!colspan="7"|ZEON ZEP520A1:1 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 23-04-2014. Resist was mixed 13-01-2014, i.e. approximately 3 months old.
|-

|-
|-style="background:silver; color:black" style="text-align:left;" 
!Spin Speed [rpm]
!Acceleration [1/s2]
!Thickness [nm]
!St Dev
|-

|-
|-style="background:WhiteSmoke; color:black"
|3000
|4000
|111.29
|0.65
|-

|-
|-style="background:WhiteSmoke; color:black"
|4000
|4000
|95.17
|2.16
|-

|-
|-style="background:WhiteSmoke; color:black"
|5000
|4000
|87.23
|0.81
|-


|}



{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  style="width: 40%"
|-

|-
|-style="background:red; color:White"
!colspan="7"|ZEON ZEP520A1:1 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 21-05-2014. Resist was mixed 15-05-2014, i.e. approximately 6 days old.
|-

|-
|-style="background:silver; color:black" style="text-align:left;" 
!Spin Speed [rpm]
!Acceleration [1/s2]
!Thickness [nm]
!St Dev
|-

|-
|-style="background:WhiteSmoke; color:black"
|2000
|4000
|141.03
|1.02
|-

|-
|-style="background:WhiteSmoke; color:black"
|3000
|4000
|115.96
|0.98
|-

|-
|-style="background:WhiteSmoke; color:black"
|4000
|4000
|100.56
|0.80
|-

|-
|-style="background:WhiteSmoke; color:black"
|5000
|4000
|91.01
|0.38
|-

|-
|-style="background:WhiteSmoke; color:black"
|6000
|4000
|84.85
|0.37
|-

|}



{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  style="width: 40%"
|-

|-
|-style="background:green; color:White"
!colspan="7"|ZEON ZEP520A1:2 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 21-05-2014. Resist was mixed 15-05-2014, i.e. approximately 6 days old.
|-

|-
|-style="background:silver; color:black" style="text-align:left;" 
!Spin Speed [rpm]
!Acceleration [1/s2]
!Thickness [nm]
!St Dev
|-

|-
|-style="background:WhiteSmoke; color:black"
|2000
|4000
|79.12
|1.74
|-

|-
|-style="background:WhiteSmoke; color:black"
|3000
|4000
|64.30
|0.34
|-

|-
|-style="background:WhiteSmoke; color:black"
|4000
|4000
|55.50
|0.48
|-

|-
|-style="background:WhiteSmoke; color:black"
|5000
|4000
|50.53
|0.62
|-

|-
|-style="background:WhiteSmoke; color:black"
|6000
|4000
|46.34
|1.01
|-

|}